Difference between revisions of "Tool List"

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|-valign="top"
  
|-valign="top"
 
|width=300|
  
|width=300|
⚫
* [[Gold Plating Bench]]
  
⚫
* [[Critical Point Dryer]]
  
⚫
* [[Spin Rinse Dryer (SemiTool)]]
  
⚫
* [[Chemical-Mechanical Polisher (Logitech)]]
  
⚫
|width=400|
  
 
* [[Wet Benches]]
  
* [[Wet Benches]]
 
**[[Solvent Cleaning Benches]]
  
**[[Solvent Cleaning Benches]]
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**[[HF/TMAH Processing Benches]]
  
**[[HF/TMAH Processing Benches]]
 
**[[Plating Bench]]
  
**[[Plating Bench]]
  ⚫
|width=400|
  ⚫
* [[Gold Plating Bench]]
  ⚫
* [[Critical Point Dryer]]
  ⚫
* [[Spin Rinse Dryer (SemiTool)]]
  ⚫
* [[Chemical-Mechanical Polisher (Logitech)]]
 
|-
  
|-
 
|}
  
|}

Revision as of 07:16, 16 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization

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