Difference between revisions of "Tool List"

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m (→‎Optical/Electron Microscopy: moved SEMs to bottom)
(→‎Thermal Processing for Photolithography: link to new Ovens Overview page)
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===== Thermal Processing for Photolithography =====
===== Thermal Processing for Photolithography =====
* [[Ovens - Overview of All Lab Ovens|Ovens - Overview of all lab ovens]]
* [[Ovens 1, 2 & 3 (Labline)]]
* [[Ovens 1, 2 & 3 (Labline)]]
* [[Oven 4 (Fisher)]]
* [[Oven 4 (Fisher)]]

Revision as of 10:25, 4 June 2019


You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing


Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools