Difference between revisions of "Tool List"
Jump to navigation
Jump to search
(→Thermal Processing: added ovens from "lithography" section) |
|||
| Line 98: | Line 98: | ||
* [[Tube Furnace AlGaAs Oxidation (Linberg)]] | * [[Tube Furnace AlGaAs Oxidation (Linberg)]] | ||
* [[Wafer Bonder (SUSS SB6-8E)]] | * [[Wafer Bonder (SUSS SB6-8E)]] | ||
| + | * [[Ovens 1, 2 & 3 (Labline)]] | ||
| + | * [[Oven 4 (Fisher)]] | ||
| + | * [[Oven 5 (Labline)]] | ||
| + | * [[High Temp Oven (Blue M)]] | ||
| + | * [[Vacuum Oven (YES)]] | ||
=Packaging= | =Packaging= | ||
Revision as of 19:54, 8 September 2017
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
- Rapid Thermal Processor (AET RX6)
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)
- Wafer Bonder (SUSS SB6-8E)
- Ovens 1, 2 & 3 (Labline)
- Oven 4 (Fisher)
- Oven 5 (Labline)
- High Temp Oven (Blue M)
- Vacuum Oven (YES)