Difference between revisions of "Tool List"

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*[[Thermal Evap 1]]  
 
*[[Thermal Evap 1]]  
 
*[[Thermal Evap 2 (Solder)]]  
 
*[[Thermal Evap 2 (Solder)]]  
*[[Unaxis VLR ICP-PECVD]]  
+
*[[ICP-PECVD (Unaxis VLR)]]  
 
*[[Ion Beam Deposition (Veeco NEXUS)]]  
 
*[[Ion Beam Deposition (Veeco NEXUS)]]  
 
*[[Molecular Vapor Deposition]]  
 
*[[Molecular Vapor Deposition]]  

Revision as of 07:48, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization