Difference between revisions of "Tool List"

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*[[RIE 3 (MRC)]]  
 
*[[RIE 3 (MRC)]]  
 
*[[RIE 5 (PlasmaTherm)]]  
 
*[[RIE 5 (PlasmaTherm)]]  
*[[Si Deep RIE (Bosch Etch)]]  
+
*[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]  
 
*[[Ashers (Technics PEII)]]  
 
*[[Ashers (Technics PEII)]]  
 
*[[Unaxis VLR ICP-Etch]]
 
*[[Unaxis VLR ICP-Etch]]

Revision as of 06:46, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization