Difference between revisions of "Tool List"

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*[[PECVD 2 (Advanced Vacuum)]]  
 
*[[PECVD 2 (Advanced Vacuum)]]  
 
*[[Thermal Evap 1]]  
 
*[[Thermal Evap 1]]  
*[[Thermal Evap 2]]  
+
*[[Thermal Evap 2 (Solder)]]  
 
*[[Unaxis VLR ICP-PECVD]]  
 
*[[Unaxis VLR ICP-PECVD]]  
 
*[[Ion Beam Deposition (Veeco NEXUS)]]  
 
*[[Ion Beam Deposition (Veeco NEXUS)]]  

Revision as of 13:00, 10 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization