Difference between revisions of "Tool List"
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* [[Chemical-Mechanical Polisher (Logitech)]] |
* [[Chemical-Mechanical Polisher (Logitech)]] |
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− | * |
+ | * Wet Benches |
**[[Acid Benches]] |
**[[Acid Benches]] |
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**[[Solvent Benches]] |
**[[Solvent Benches]] |
Revision as of 08:29, 10 July 2012
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
- Rapid Thermal Processor (AET RX6)
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)