Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 63: Line 63:
  
 
| width="400" |  
 
| width="400" |  
*[[ICP Etch 1 (Panasonic E620)]]  
+
*[[ICP Etch 1 (Panasonic E626I)]]  
*[[ICP Etch 2 (Panasonic E626)]]  
+
*[[ICP Etch 2 (Panasonic E640)]]  
 
*[[UV Ozone Reactor]]  
 
*[[UV Ozone Reactor]]  
 
*[[Plasma Clean (Gasonics 2000)]]  
 
*[[Plasma Clean (Gasonics 2000)]]  

Revision as of 12:13, 9 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization