Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 119: Line 119:
 
* [[Optical Film Thickness (Nanometric)]]
 
* [[Optical Film Thickness (Nanometric)]]
 
* [[Scanning Probe Microscope (Veeco NanoMan)]]
 
* [[Scanning Probe Microscope (Veeco NanoMan)]]
 +
* [[Surfscan 6200]]
 
|width=400|
 
|width=400|
 
* [[Tencor Flexus Film Stress]]
 
* [[Tencor Flexus Film Stress]]

Revision as of 16:13, 3 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization