Difference between revisions of "Tool List"

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* [[Probe Station & Curve Tracer]]
 
* [[Probe Station & Curve Tracer]]
 
* [[Optical Film Thickness (Filmetrics)]]
 
* [[Optical Film Thickness (Filmetrics)]]
 +
* [[Optical Film Thickness (Nanometric)]]
 
* [[Scanning Probe Microscope (Veeco NanoMan)]]
 
* [[Scanning Probe Microscope (Veeco NanoMan)]]
 +
|width=400|
 
* [[Tencor Flexus Film Stress]]
 
* [[Tencor Flexus Film Stress]]
|width=400|
 
* [[Optical Film Thickness (Nanometric)]]
 
 
* [[SEM Sample Coater (Hummer)]]
 
* [[SEM Sample Coater (Hummer)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]

Revision as of 09:54, 1 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization