Difference between revisions of "Tool List"

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=Thermal Processing=
 
=Thermal Processing=
* [[Rapid Thermal Processor]]
+
* [[Rapid Thermal Processor (AET RX6)]]
 
* [[Strip Annealer]]
 
* [[Strip Annealer]]
 
* [[Tube Furnace (Tystar 8300)]]
 
* [[Tube Furnace (Tystar 8300)]]

Revision as of 12:55, 28 June 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization