Difference between revisions of "Tool List"

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(Thermal Processing: link to Logitech wafer bonder)
(correct Logitech link with model: WSB7)
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* [[Vacuum Oven (YES)]]
* [[Vacuum Oven (YES)]]
* [[Wafer Bonder (SUSS SB6-8E)]]
* [[Wafer Bonder (SUSS SB6-8E)]]
* [[Wafer Bonder (Logitech WSB2)|Wafer Bonder/Wax Mounting (Logitech WSB2)]]
* [[Wafer Bonder (Logitech WSB7)|Wafer Bonder/Wax Mounting (Logitech WSB2)]]

Revision as of 15:14, 22 August 2018


You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing


Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools