Tony Bosch

Tony Bosch Position Senior Equipment Engineer Room Number 1109C Phone (805) 839-3918x217 E-Mail bosch@ece.ucsb.edu

About

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Tools

Tony Bosch is the supervisor for the following tools.

Nano-Imprint (Nanonex NX2000) Oven 4 (Fisher) Vacuum Oven (YES) Sputter 3 (AJA ATC 2000-F) ICP-PECVD (Unaxis VLR) ICP-Etch (Unaxis VLR) UV Ozone Reactor Gold Plating Bench ICP Etch 2 (Panasonic E640)

Tube Furnace (Tystar 8300) Tube Furnace AlGaAs Oxidation (Linberg) Flip-Chip Bonder (Finetech) Microscopes Probe Station & Curve Tracer Optical Film Thickness (Filmetrics) SEM Sample Coater (Hummer) Resistivity Mapper (CDE RESMAP) Laser Scanning Confocal M-scope (Olympus LEXT) Deep UV Optical Microscope (Olympus) Fluorescence Microscope (Olympus MX51)