Difference between revisions of "Tony Bosch"
Jump to navigation
Jump to search
| Line 35: | Line 35: | ||
*[[Coater Track (SCube)]] |
*[[Coater Track (SCube)]] |
||
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
||
| − | *[[Fluorine |
+ | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
*[[Lift-Off Station]] |
*[[Lift-Off Station]] |
||
* [[]] |
* [[]] |
||
Revision as of 19:32, 27 October 2021
|
About
.
.
.
Tools
Tony Bosch is the supervisor for the following tools.