Difference between revisions of "Tony Bosch"
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*[[ICP-PECVD (Unaxis VLR)]] |
*[[ICP-PECVD (Unaxis VLR)]] |
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*[[ICP-Etch (Unaxis VLR)]] |
*[[ICP-Etch (Unaxis VLR)]] |
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| − | *[[Oxford ICP |
+ | *[[Oxford ICP Etcher (PlasmaPro 100 Cobra)]] |
*[[Gold Plating Bench]] |
*[[Gold Plating Bench]] |
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*[[ICP Etch 2 (Panasonic E640)]] |
*[[ICP Etch 2 (Panasonic E640)]] |
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| − | *[[Rodwell Tube Furnace]] |
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*[[Tube Furnace (Tystar 8300)]] |
*[[Tube Furnace (Tystar 8300)]] |
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*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
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*[[Flip-Chip Bonder (Finetech)]] |
*[[Flip-Chip Bonder (Finetech)]] |
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*[[Deep UV Optical Microscope (Olympus)]] |
*[[Deep UV Optical Microscope (Olympus)]] |
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| − | *[[Laser Scanning Confocal M- |
+ | *[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
| + | *[[Automated Coat/Develop System (S-Cubed Flexi)]] |
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| − | *[[Coater Track (SCube)]] |
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*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
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*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
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| − | *[[Lift-Off Station]] |
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| − | * [[]] |
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Latest revision as of 09:53, 28 October 2021
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About
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.
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Tools
Tony Bosch is the supervisor for the following tools.