Difference between revisions of "Tony Bosch"
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*[[ICP Etch 2 (Panasonic E640)]] | *[[ICP Etch 2 (Panasonic E640)]] | ||
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| − | |||
*[[Tube Furnace (Tystar 8300)]] | *[[Tube Furnace (Tystar 8300)]] | ||
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] | *[[Tube Furnace AlGaAs Oxidation (Linberg)]] | ||
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*[[Deep UV Optical Microscope (Olympus)]] | *[[Deep UV Optical Microscope (Olympus)]] | ||
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]] | *[[Laser Scanning Confocal M-scope (Olympus LEXT)]] | ||
| − | *[[ | + | *[[Automated Coat/Develop System (S-Cubed Flexi)]] |
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] | *[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] | ||
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] | ||
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| − | |||
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Latest revision as of 09:53, 28 October 2021
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About
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Tools
Tony Bosch is the supervisor for the following tools.