Difference between revisions of "Tony Bosch"
Jump to navigation
Jump to search
(6 intermediate revisions by the same user not shown) | |||
Line 23: | Line 23: | ||
*[[ICP-PECVD (Unaxis VLR)]] |
*[[ICP-PECVD (Unaxis VLR)]] |
||
*[[ICP-Etch (Unaxis VLR)]] |
*[[ICP-Etch (Unaxis VLR)]] |
||
− | *[[Oxford ICP |
+ | *[[Oxford ICP Etcher (PlasmaPro 100 Cobra)]] |
*[[Gold Plating Bench]] |
*[[Gold Plating Bench]] |
||
*[[ICP Etch 2 (Panasonic E640)]] |
*[[ICP Etch 2 (Panasonic E640)]] |
||
|| |
|| |
||
− | *[[Rodwell Tube Furnace]] |
||
*[[Tube Furnace (Tystar 8300)]] |
*[[Tube Furnace (Tystar 8300)]] |
||
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
||
*[[Flip-Chip Bonder (Finetech)]] |
*[[Flip-Chip Bonder (Finetech)]] |
||
*[[Deep UV Optical Microscope (Olympus)]] |
*[[Deep UV Optical Microscope (Olympus)]] |
||
− | *[[Laser Scanning Confocal M- |
+ | *[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
+ | *[[Automated Coat/Develop System (S-Cubed Flexi)]] |
||
− | *[[Coater Track (SCube)]] |
||
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
||
− | *[[Fluorine |
+ | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
− | *[[Lift-Off Station]] |
||
− | * [[]] |
||
|} |
|} |
Latest revision as of 09:53, 28 October 2021
|
About
.
.
.
Tools
Tony Bosch is the supervisor for the following tools.