Difference between revisions of "Tony Bosch"

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*[[ICP-PECVD (Unaxis VLR)]]
 
*[[ICP-PECVD (Unaxis VLR)]]
 
*[[ICP-Etch (Unaxis VLR)]]
 
*[[ICP-Etch (Unaxis VLR)]]
*[[Oxford ICP Cobra Etch]]
+
*[[Oxford ICP Etcher (PlasmaPro 100 Cobra)]]
 
*[[Gold Plating Bench]]
 
*[[Gold Plating Bench]]
 
*[[ICP Etch 2 (Panasonic E640)]]
 
*[[ICP Etch 2 (Panasonic E640)]]
 
||
 
||
*[[Rodwell Tube Furnace]]
 
 
*[[Tube Furnace (Tystar 8300)]]
 
*[[Tube Furnace (Tystar 8300)]]
 
*[[Tube Furnace AlGaAs Oxidation (Linberg)]]
 
*[[Tube Furnace AlGaAs Oxidation (Linberg)]]
 
*[[Flip-Chip Bonder (Finetech)]]
 
*[[Flip-Chip Bonder (Finetech)]]
 
*[[Deep UV Optical Microscope (Olympus)]]
 
*[[Deep UV Optical Microscope (Olympus)]]
*[[Laser Scanning Confocal M-Scope (Olympus LEXT)]]
+
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]
*[[Coater Track (SCube)]]
+
*[[Automated Coat/Develop System (S-Cubed Flexi)]]
*[[DSC (Plasma-Therm)]]
+
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]]
*[[Fluorine Etch (Plasma-Therm SLR)]]
+
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]]
*[[Lift-Off Station]]
 
* [[]]  
 
 
|}
 
|}

Latest revision as of 09:53, 28 October 2021