Difference between revisions of "Tony Bosch"
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| − | *[[Oven 4 (Fisher)]] |
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| − | *[[Vacuum Oven (YES)]] |
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*[[Sputter 3 (AJA ATC 2000-F)]] |
*[[Sputter 3 (AJA ATC 2000-F)]] |
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*[[Sputter 4 (AJA ATC 2200-V)]] |
*[[Sputter 4 (AJA ATC 2200-V)]] |
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| Line 25: | Line 23: | ||
*[[ICP-PECVD (Unaxis VLR)]] |
*[[ICP-PECVD (Unaxis VLR)]] |
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*[[ICP-Etch (Unaxis VLR)]] |
*[[ICP-Etch (Unaxis VLR)]] |
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| + | *[[Oxford ICP Etcher (PlasmaPro 100 Cobra)]] |
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*[[Gold Plating Bench]] |
*[[Gold Plating Bench]] |
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*[[ICP Etch 2 (Panasonic E640)]] |
*[[ICP Etch 2 (Panasonic E640)]] |
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| Line 31: | Line 30: | ||
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
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*[[Flip-Chip Bonder (Finetech)]] |
*[[Flip-Chip Bonder (Finetech)]] |
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| − | *[[Microscopes]] |
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| − | *[[Probe Station & Curve Tracer]] |
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| − | *[[Optical Film Thickness (Filmetrics)]] |
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| − | *[[Resistivity Mapper (CDE RESMAP)]] |
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| − | *[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
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*[[Deep UV Optical Microscope (Olympus)]] |
*[[Deep UV Optical Microscope (Olympus)]] |
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| − | * |
+ | *[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
| + | *[[Automated Coat/Develop System (S-Cubed Flexi)]] |
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| + | *[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
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| + | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
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Latest revision as of 09:53, 28 October 2021
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About
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.
.
Tools
Tony Bosch is the supervisor for the following tools.