Difference between revisions of "Tony Bosch"
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|position = Senior Equipment Engineer | |position = Senior Equipment Engineer | ||
|room = 1109C | |room = 1109C | ||
| − | |phone = (805) 839- | + | |phone = (805) 839-3486 |
|email = bosch@ece.ucsb.edu | |email = bosch@ece.ucsb.edu | ||
}} | }} | ||
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|- valign="top" | |- valign="top" | ||
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*[[Sputter 3 (AJA ATC 2000-F)]] | *[[Sputter 3 (AJA ATC 2000-F)]] | ||
*[[Sputter 4 (AJA ATC 2200-V)]] | *[[Sputter 4 (AJA ATC 2200-V)]] | ||
| Line 26: | Line 23: | ||
*[[ICP-PECVD (Unaxis VLR)]] | *[[ICP-PECVD (Unaxis VLR)]] | ||
*[[ICP-Etch (Unaxis VLR)]] | *[[ICP-Etch (Unaxis VLR)]] | ||
| + | *[[Oxford ICP Etcher (PlasmaPro 100 Cobra)]] | ||
*[[Gold Plating Bench]] | *[[Gold Plating Bench]] | ||
*[[ICP Etch 2 (Panasonic E640)]] | *[[ICP Etch 2 (Panasonic E640)]] | ||
| Line 32: | Line 30: | ||
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] | *[[Tube Furnace AlGaAs Oxidation (Linberg)]] | ||
*[[Flip-Chip Bonder (Finetech)]] | *[[Flip-Chip Bonder (Finetech)]] | ||
| − | *[[ | + | *[[Deep UV Optical Microscope (Olympus)]] |
| − | |||
| − | |||
| − | |||
| − | |||
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]] | *[[Laser Scanning Confocal M-scope (Olympus LEXT)]] | ||
| − | *[[Deep | + | *[[Automated Coat/Develop System (S-Cubed Flexi)]] |
| − | * [[ | + | *[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
| + | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] | ||
|} | |} | ||
Latest revision as of 09:53, 28 October 2021
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About
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Tools
Tony Bosch is the supervisor for the following tools.