Difference between revisions of "Tony Bosch"
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{{staff|{{PAGENAME}} |
{{staff|{{PAGENAME}} |
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− | |position = Senior |
+ | |position = Senior Equipment Engineer |
|room = 1109C |
|room = 1109C |
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|phone = (805) 839-3918x217 |
|phone = (805) 839-3918x217 |
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|- valign="top" |
|- valign="top" |
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− | *[[Nano-Imprint (Nanonex NX2000)]] |
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*[[Oven 4 (Fisher)]] |
*[[Oven 4 (Fisher)]] |
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*[[Vacuum Oven (YES)]] |
*[[Vacuum Oven (YES)]] |
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− | *[[E-Beam 2 (Custom)]] |
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− | *[[E-Beam 4 (CHA)]] |
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*[[Sputter 3 (AJA ATC 2000-F)]] |
*[[Sputter 3 (AJA ATC 2000-F)]] |
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+ | *[[Sputter 4 (AJA ATC 2200-V)]] |
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+ | *[[Sputter 5 (AJA ATC 2200-V)]] |
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*[[ICP-PECVD (Unaxis VLR)]] |
*[[ICP-PECVD (Unaxis VLR)]] |
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*[[ICP-Etch (Unaxis VLR)]] |
*[[ICP-Etch (Unaxis VLR)]] |
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− | *[[UV Ozone Reactor]] |
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*[[Gold Plating Bench]] |
*[[Gold Plating Bench]] |
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+ | *[[ICP Etch 2 (Panasonic E640)]] |
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− | *[[Strip Annealer]] |
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|| |
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*[[Tube Furnace (Tystar 8300)]] |
*[[Tube Furnace (Tystar 8300)]] |
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*[[Probe Station & Curve Tracer]] |
*[[Probe Station & Curve Tracer]] |
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*[[Optical Film Thickness (Filmetrics)]] |
*[[Optical Film Thickness (Filmetrics)]] |
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− | *[[SEM Sample Coater (Hummer)]] |
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*[[Resistivity Mapper (CDE RESMAP)]] |
*[[Resistivity Mapper (CDE RESMAP)]] |
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*[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
Revision as of 08:32, 27 April 2021
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About
.
.
.
Tools
Tony Bosch is the supervisor for the following tools.