Difference between revisions of "Thermal Processing Recipes"
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(→Thermal Oxidation of Silicon: added simulation/data for Wet1050 and Dry1050) |
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| + | ==Tystar 8300== |
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Please see the [[Calculators + Utilities]] page for links to these oxidation calculators. |
Please see the [[Calculators + Utilities]] page for links to these oxidation calculators. |
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| + | Using the [http://www.lelandstanfordjunior.com/thermaloxide.html Stanford Leland Jr. "Advanced Silicon Thermal Oxide Thickness Calculator"], we have determined the following simulation parameters to predict oxidation times. |
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| − | Thermal oxidation recipes for Wet (H2O vapor) and Dry (O2 gas) oxidation up to 1050°C are available on the [[Tube Furnace (Tystar 8300)|TyStar 8300 system]]. |
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| + | ==== 1050°C Dry Oxidation ==== |
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| + | * Partial Pressure = 1.09 |
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| + | * <100>, 1050°C, 10Å Native Oxide, no dopants |
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| + | [[File:TyStar Thermal Oxidations - DryOx 1050°C 2018-04-09.png|frameless|300x300px]] |
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| + | ==== 1050°C Wet Oxidation ==== |
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| + | * Partial Pressure = 1.12 |
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| + | * <100>, 1050°C, 10Å Native Oxide, no dopants |
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| + | {| |
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| + | ![[File:TyStar Thermal Oxidations - WetOx 1050°C 2018-04-09.png|border|frameless|304x304px]] |
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| + | ![[File:TyStar Thermal Oxidations - WetOx 1050°C 2018-04-09 zoom.png|frameless|300x300px]] |
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| + | |} |
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| − | =Wafer Substrate Bonding= |
+ | ==Wafer Substrate Bonding== |
Numerous research groups perform wafer bonding using either the [[Wafer Bonder (SUSS SB6-8E)|Suss Wafer Bonder]] or a custom graphite fixture and any one of [[Thermal Processing|numerous ovens]], such as the N2-purged [[Tube Furnace Wafer Bonding (Thermco)|Wafer Bonding Furnace]] (with glove box) or N2-purged [[High Temp Oven (Blue M)|Blue M oven]]. |
Numerous research groups perform wafer bonding using either the [[Wafer Bonder (SUSS SB6-8E)|Suss Wafer Bonder]] or a custom graphite fixture and any one of [[Thermal Processing|numerous ovens]], such as the N2-purged [[Tube Furnace Wafer Bonding (Thermco)|Wafer Bonding Furnace]] (with glove box) or N2-purged [[High Temp Oven (Blue M)|Blue M oven]]. |
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Revision as of 12:17, 9 April 2018
Tystar 8300
Thermal Oxidation of Silicon
Online calculators for thermal oxidation can be used to estimate the oxidation time for a desired oxidation thickness. Please see the Calculators + Utilities page for links to these oxidation calculators.
Using the Stanford Leland Jr. "Advanced Silicon Thermal Oxide Thickness Calculator", we have determined the following simulation parameters to predict oxidation times.
1050°C Dry Oxidation
- Partial Pressure = 1.09
- <100>, 1050°C, 10Å Native Oxide, no dopants
1050°C Wet Oxidation
- Partial Pressure = 1.12
- <100>, 1050°C, 10Å Native Oxide, no dopants
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Wafer Substrate Bonding
Numerous research groups perform wafer bonding using either the Suss Wafer Bonder or a custom graphite fixture and any one of numerous ovens, such as the N2-purged Wafer Bonding Furnace (with glove box) or N2-purged Blue M oven.
The EVG Plasma Activation system and Goniometer allow for surface prep/inspection prior to bonding.