Difference between revisions of "Thermal Evaporation Recipes"
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Revision as of 11:26, 16 April 2014
Back to Vacuum Deposition Recipes.
Thermal Evaporator 1
Materials Table
Thermal Evaporator 2
Materials Table
Materials Table for Thermal Evaporator #1
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|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Material | Symbol | Density, g/cm3 | Z Ratio | Tooling, % | Current, Amp | Dep.rate, A/sec | Comments | ||||||||
| Aluminum | Al | 2.70 | 8.17 | 95 | 85 | 1 | Used often | ||||||||
| Chromium | Cr | 7.20 | 28.95 | 95 | 85 | 2 | Used often | ||||||||
| Cobalt | Co | 8.71 | 25.74 | ||||||||||||
| Copper | Cu | 8.93 | 20.21 | 100 | Used often | ||||||||||
| Gold | Au | 19.32 | 23.18 | 101.2 | 122 | 5 | Used often | ||||||||
| Gold/Palladium | Au.5/Pd.5 | 15.86 | 23.96 | ||||||||||||
| Gold/Palladium | Au.5/Pd.4 | 16.40 | 23.80 | ||||||||||||
| Gold/Zinc | Au.95/Zn.05 | 18.72 | 22.89 | 101.2 | |||||||||||
| Gold/Zinc | Au.90/Zn.10 | 18.07 | 22.58 | Zinc Oxide | ZnO | 5.61 | 15.88 | ||||||||
| StrontiumFluoride | SrF2 | 4.28 | 12.15 | 200 | |||||||||||
| Iron | Fe | 7.86 | 25.30 | ||||||||||||
| ITO(IndiumTinOxide) | In2O3-SnO2 | 5.43-7.14 | 0.841 | ||||||||||||
| Permalloy | Ni0.1Fe0.2 | 8.7 | 26.40 | 140 | 0.1 | ||||||||||
Materials Table for Thermal Evaporator #2
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|---|---|---|---|---|---|
| Material | Symbol | Density, g/cm3 | Z Ratio | Tooling, % | Comments |
| Aluminum | Al | 2.70 | 1.08 | ||
| Antimony | Sb | 6.620 | 0.768 | ||
| Arsenic | As | 5.73 | 0.996 | ||
| Beryllium | Be | 1.85 | 0.543 | ||
| Boron | B | 2.54 | 0.389 | ||
| Cadmium | Cd | 8.64 | 0.682 | ||
| Cadmium sulfide | CdS | 4.83 | 1.02 | ||
| Cadmium telluride | CdTe | 5.85 | 0.980 | ||
| Calcium fluoride | CaF2 | 3.18 | 0.775 | Used often | |
| Carbon (graphite) | C | 2.25 | 3.26 | ||
| Chromium | Cr | 7.20 | 0.305 | 155 | Used often |
| Cobalt | Co | 8.71 | 0.343 | ||
| Copper | Cu | 8.93 | 0.437 | ||
| Gallium | Ga | 5.93 | 0.593 | ||
| Gallium Arsenide | GaAs | 5.31 | 1.59 | ||
| Germanium | Ge | 5.35 | 0.516 | ||
| Gold | Au | 19.30 | 0.381 | Used often | |
| Indium | In | 7.30 | 0.841 | 120 | Used often |
| Indium antimonide | InSb | 5.76 | 0.769 | ||
| Iridium | Ir | 22.4 | 0.129 | ||
| Iron | Fe | 7.86 | 0.349 | ||
| Lead | Pb | 11.3 | 1.13 | ||
| Lead sulfide | PbS | 7.50 | 0.566 | ||
| Lithium fluoride | LiF | 2.638 | 0.778 | ||
| Magnesium | Mg | 1.74 | 1.61 | ||
| Magnesium oxide | MgO | 3.58 | 0.411 | ||
| Magnesium Fluoride | MgF2 | 3.00 ( should be 3.18) | 0.427( should be 0.637) | ||
| Manganese | Mn | 7.20 | 0.377 | ||
| Manganese(II) Sulfide | MnS | 3.99 | 0.94 | ||
| Mercury | Hg | 13.46 | 0.74 | ||
| Molybdenum | Mo | 10.2 | 0.257 | ||
| Nickel | Ni | 8.91 | 0.331 | Used often | |
| Niobium | Nb | 8.578 | 0.492 | ||
| Niobium(V) Oxide | Nb2O5 | 4.47 | *1.00 | *z ratio has not been established | |
| Palladium | Pd | 12.0 | 0.357 | ||
| Platinum | Pt | 21.4 | 0.245 | ||
| Potasium Cloride | KCl | 1.98 | 2.05 | ||
| Selenium | Se | 4.82 | 0.864 | ||
| Silicon | Si | 2.32 | 0.712 | ||
| Silicon(II) Oxide | SiO | 2.13 | 0.87 | ||
| Silicon dioxide (fused quarz) | SiO2 | 2.20 | 1.07 | ||
| Silver | Ag | 10.5 | 0.529 | ||
| Silver bromide | AgBr | 6.47 | 1.18 | ||
| Silver chloride | AgCl | 5.56 | 1.32 | ||
| Sodium | Na | 0.97 | 4.8 | ||
| Sodium chloride | NaCl | 2.17 | 1.57 | ||
| Tantalum | Ta | 16.6 | 0.262 | ||
| Tantalum(IV) oxide | Ta2O5 | 8.2 | 0.30 | ||
| Tin | Sn | 7.30 | 0.724 | Used often | |
| Titanium | Ti | 4.50 | 0.628 | Used often | |
| Titanium (IV) Oxide | TiO2 | 4.26 | 0.40 | ||
| Titanium Oxide | TiO | 4.90 | *1.00 | * z ratio not established | |
| Tungsten | W | 19.3 | 0.163 | ||
| Tungsten carbide | WC | 15.6 | 0.151 | ||
| Zinc | Zn | 7.04 | 0.514 | Used often | |
| Zinc Oxide | ZnO | 5.61 | 0.556 | ||
| Zinc Sulfide | ZnS | 4.09 | 0.775 | ||
| Zirconium | Zr | 6.51 | 0.60 | Should be 6.49 | |
| Zirconium Oxide | ZrO2 | 5.6 | 1.001 | ||