Difference between revisions of "Thermal Evaporation Recipes"
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Revision as of 14:25, 31 March 2014
Back to Vacuum Deposition Recipes.
Thermal Evaporator 1
Materials Table
Materials Table
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|---|---|---|---|---|---|---|---|
| Material | Symbol | Density, g/cm3 | Z Ratio | Tooling, % | Current, Amp | Dep.rate, A/sec | Comments |
| Aluminum | Al | 2.70 | 8.17 | 95 | 85 | 1 | Used often |
| Chromium | Cr | 7.20 | 28.95 | 95 | 85 | 2 | Used often |
| Cobalt | Co | 8.71 | 25.74 | ||||
| Copper | Cu | 8.93 | 20.21 | 100 | Used often | ||
| Gold | Au | 19.32 | 23.18 | 101.2 | 122 | 5 | Used often |
| Gold/Palladium | Au.5/Pd.5 | 15.86 | 23.96 | ||||
| Gold/Palladium | Au.5/Pd.4 | 16.40 | 23.80 | ||||
| Gold/Zinc | Au.95/Zn.05 | 18.72 | 22.89 | 101.2 | |||
| Gold/Zinc | Au.90/Zn.10 | 18.07 | 22.58 | ||||
| Magnezium | Mg | 1.74 | 5.48 | 98.4 | |||
| Manganese | Mn | 7.20 | 23.40 | 120 | 100 | ||
| Nickel | Ni | 8.90 | 26.68 | 100 | 50 | 4.5 | Used often |
| Nichrome | NiCr | 8.32 | 27.59 | 100 | 0.4 | ||
| Palladium | Pd | 12.40 | 24.73 | 140.5 | 62 | 1.5 | Used often |
| Silicon Monoxide | SiO | 2.13 | 10.19 | 120 | 70 | ||
| Silver | Ag | 10.5 | 16.69 | ||||
| Zinc | Zn | 7.14 | 17.18 | 50 | 4.5 | Used often | |
| Zinc Oxide | ZnO | 5.61 | 15.88 | ||||
| StrontiumFluoride | SrF2 | 4.28 | 12.15 | 200 | |||
| Iron | Fe | 7.86 | 25.30 | ||||
| ITO(IndiumTinOxide) | In2O3 - SnO2 | 6.43-7.14 | 0.841 | ||||
| Permalloy | Ni0.1Fe0.2 | 8.7 | 26.40 | 140 | 0.1 | ||