Difference between revisions of "Thermal Evaporation Recipes"

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=Thermal Evaporator 1=
  
=Thermal Evaporator 1=
 
= Materials Table =
  
= Materials Table =
  +
  +
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable"
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|-
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! colspan=8 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
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|- bgcolor="#D0E7FF"
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! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
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! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol'''
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! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
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! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
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! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %'''
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! width="45" bgcolor="#D0E7FF" align="center" | '''Current, Amp'''
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! width="45" bgcolor="#D0E7FF" align="center" | '''Dep.rate, A/sec'''
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! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
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|-
  +
|Aluminum
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|Al
  +
|2.70
  +
|8.17
  +
|95
  +
|85
  +
|1
  +
|Used often
  +
|-
  +
|Chromium
  +
|Cr
  +
| 7.20
  +
| 28.95
  +
|95
  +
|85
  +
|2
  +
|Used often
  +
|-
  +
|Cobalt
  +
|Co
  +
|8.71
  +
|25.74
  +
|
  +
|
  +
|
  +
|
  +
|-
  +
|Copper
  +
|Cu
  +
|8.93
  +
|20.21
  +
|100
  +
|
  +
|
  +
|Used often
  +
|-
  +
|Gold
  +
|Au
  +
|19.32
  +
|23.18
  +
|101.2
  +
|122
  +
|5
  +
|Used often
  +
|-
  +
|Gold/Palladium
  +
|Au.5/Pd.5
  +
|15.86
  +
|23.96
  +
|
  +
|
  +
|
  +
|
  +
|-
  +
|Gold/Palladium
  +
|Au.5/Pd.4
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|16.40
  +
|23.80
  +
|
  +
|
  +
|
  +
|
  +
|-
  +
|Gold/Zinc
  +
|Au.95/Zn.05
  +
|18.72
  +
|22.89
  +
|101.2
  +
|
  +
|
  +
|
  +
|-
  +
|Gold/Zinc
  +
|Au.90/Zn.10
  +
|18.07
  +
|22.58
  +
|
  +
|
  +
|
  +
|
  +
|-
  +
|Magnezium
  +
|Mg
  +
|1.74
  +
|5.48
  +
|98.4
  +
|
  +
|
  +
|
  +
|-
  +
|Manganese
  +
|Mn
  +
|7.20
  +
|23.40
  +
|120
  +
|100
  +
|
  +
|
  +
|-
  +
|Nickel
  +
|Ni
  +
|8.90
  +
|26.68
  +
|100
  +
|50
  +
|4.5
  +
|Used often
  +
|-
  +
|Nichrome
  +
|NiCr
  +
|8.32
  +
|27.59
  +
|
  +
|100
  +
|0.4
  +
|
  +
|-
  +
|Palladium
  +
|Pd
  +
|12.40
  +
|24.73
  +
|140.5
  +
|62
  +
|1.5
  +
|Used often
  +
|-
  +
|Silicon Monoxide
  +
|SiO
  +
|2.13
  +
|10.19
  +
|120
  +
|70
  +
|
  +
|
  +
|-
  +
|Silver
  +
|Ag
  +
|10.5
  +
|16.69
  +
|
  +
|
  +
|
  +
|
  +
|-
  +
|Zinc
  +
|Zn
  +
|7.14
  +
|17.18
  +
|
  +
|50
  +
|4.5
  +
|Used often
  +
|-
  +
|Zinc Oxide
  +
|ZnO
  +
|5.61
  +
|15.88
  +
|
  +
|
  +
|
  +
|
  +
|-
  +
|StrontiumFluoride
  +
|SrF<sub>2
  +
|4.28
  +
|12.15
  +
|200
  +
|
  +
|
  +
|
  +
|-
  +
|Iron
  +
|Fe
  +
|7.86
  +
|25.30
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|
  +
|
  +
|
  +
|
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|-
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|ITO(IndiumTinOxide)
  +
|In<sub>2</sub>O<sub>3</sub> - SnO<sub>2</sub>
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|6.43-7.14
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|0.841
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|
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|
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|
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|
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|-
  +
|Permalloy
  +
|Ni<sub>0.1</sub>Fe<sub>0.2
  +
|8.7
  +
|26.40
  +
|
  +
|140
  +
|0.1
  +
|
  +
|-

Revision as of 13:54, 31 March 2014

Back to Vacuum Deposition Recipes.

Thermal Evaporator 1

Materials Table

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