Difference between revisions of "Thermal Evaporation Recipes"

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{{recipes|Vacuum Deposition}}
  
{{recipes|Vacuum Deposition}}
  +
−
=[[Thermal Evap 1]]=
  
  +
=[[Thermal Evaporator 1]]=
−
= Materials Table =
  
  +
  +
==Materials Table==
   
 
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable"
  
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable"
 
|-
  
|-
−
! colspan=8 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
 +
! colspan=8 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table for Thermal Evaporator #1</div>
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
 
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
 
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
 
! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol'''
 
! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
+
! width="95" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
 
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
 
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
 
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %'''
 
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Current, Amp'''
 +
! width="95" bgcolor="#D0E7FF" align="center" | '''Current, Amp'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Dep.rate, A/sec'''
 +
! width="95" bgcolor="#D0E7FF" align="center" | '''Dep.rate, A/sec'''
−
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
 +
! width="95" bgcolor="#D0E7FF" align="center" | '''Comments'''
 
|-
  
|-
 
|Aluminum
  
|Aluminum
Line 27: Line 29:
 
|Chromium
  
|Chromium
 
|Cr
  
|Cr
−
| 7.20
 +
|7.20
−
| 28.95
 +
|28.95
 
|95
  
|95
 
|85
  
|85
Line 178: Line 180:
 
|
  
|
 
|-
  
|-
  +
|Strontium Fluoride
−
|StrontiumFluoride
  
−
|SrF<sub>2
 +
|SrF<sub>2
 
|4.28
  
|4.28
 
|12.15
  
|12.15
Line 197: Line 199:
 
|-
  
|-
 
|ITO(IndiumTinOxide)
  
|ITO(IndiumTinOxide)
−
|In<sub>2</sub>O<sub>3</sub> - SnO<sub>2</sub>
 +
|In<sub>2</sub>O<sub>3</sub> - SnO<sub>2
 
|6.43-7.14
  
|6.43-7.14
 
|0.841
  
|0.841
Line 205: Line 207:
 
|
  
|
 
|-
  
|-
−
|Permalloy
+
|Permalloy
−
|Ni<sub>0.1</sub>Fe<sub>0.2
 +
|Ni<sub>0.1</sub>Fe<sub>0.2</sub>
 
|8.7
  
|8.7
 
|26.40
  
|26.40
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|0.1
  
|0.1
 
|
  
|
  +
|}
  +
  +
=[[Thermal Evaporator 2]]=
  +
  +
== Materials Table ==
  +
  +
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable"
 
|-
  
|-
  +
! colspan=6 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table for Thermal Evaporator #2</div>
  +
|- bgcolor="#D0E7FF"
  +
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
  +
! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol'''
  +
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
  +
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
  +
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %'''
  +
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
  +
|-
  +
|Aluminum
  +
|Al
  +
|2.70
  +
|1.08
  +
|
  +
|
  +
|-
  +
|Antimony
  +
|Sb
  +
|6.620
  +
|0.768
  +
|
  +
|
  +
|-
  +
|Arsenic
  +
|As
  +
|5.73
  +
|0.996
  +
|
  +
|
  +
|-
  +
|Beryllium
  +
|Be
  +
|1.85
  +
|0.543
  +
|
  +
|
  +
|-
  +
|Boron
  +
|B
  +
|2.54
  +
|0.389
  +
|
  +
|
  +
|-
  +
|Cadmium
  +
|Cd
  +
|8.64
  +
|0.682
  +
|
  +
|
  +
|-
  +
|Cadmium sulfide
  +
|CdS
  +
|4.83
  +
|1.02
  +
|
  +
|
  +
|-
  +
|Cadmium telluride
  +
|CdTe
  +
|5.85
  +
|0.980
  +
|
  +
|
  +
|-
  +
|Calcium fluoride
  +
|CaF<sub>2</sub>
  +
|3.18
  +
|0.775
  +
|
  +
|Used often
  +
|-
  +
|Carbon (graphite)
  +
|C
  +
|2.25
  +
|3.26
  +
|
  +
|
  +
|-
  +
|Chromium
  +
|Cr
  +
|7.20
  +
|0.305
  +
|155
  +
|Used often
  +
|-
  +
|Cobalt
  +
|Co
  +
|8.71
  +
|0.343
  +
|
  +
|
  +
|-
  +
|Copper
  +
|Cu
  +
|8.93
  +
|0.437
  +
|
  +
|
  +
|-
  +
|Gallium
  +
|Ga
  +
|5.93
  +
|0.593
  +
|
  +
|
  +
|-
  +
|Gallium Arsenide
  +
|GaAs
  +
|5.31
  +
|1.59
  +
|
  +
|
  +
|-
  +
|Germanium
  +
|Ge
  +
|5.35
  +
|0.516
  +
|
  +
|
  +
|-
  +
|Gold
  +
|Au
  +
|19.30
  +
|0.381
  +
|
  +
|Used often
  +
|-
  +
|Indium
  +
|In
  +
|7.30
  +
|0.841
  +
|120
  +
|Used often
  +
|-
  +
|Indium antimonide
  +
|InSb
  +
|5.76
  +
|0.769
  +
|
  +
|
  +
|-
  +
|Iridium
  +
|Ir
  +
|22.4
  +
|0.129
  +
|
  +
|
  +
|-
  +
|Iron
  +
|Fe
  +
|7.86
  +
|0.349
  +
|
  +
|
  +
|-
  +
|Lead
  +
|Pb
  +
|11.3
  +
|1.13
  +
|
  +
|
  +
|-
  +
|Lead sulfide
  +
|PbS
  +
|7.50
  +
|0.566
  +
|
  +
|
  +
|-
  +
|Lithium fluoride
  +
|LiF
  +
|2.638
  +
|0.778
  +
|
  +
|
  +
|-
  +
|Magnesium
  +
|Mg
  +
|1.74
  +
|1.61
  +
|
  +
|
  +
|-
  +
|Magnesium oxide
  +
|MgO
  +
|3.58
  +
|0.411
  +
|
  +
|
  +
|-
  +
|Magnesium Fluoride
  +
|MgF<sub>2</sub>
  +
|3.00 ( should be 3.18)
  +
|0.427( should be 0.637)
  +
|
  +
|
  +
|-
  +
|Manganese
  +
|Mn
  +
|7.20
  +
|0.377
  +
|
  +
|
  +
|-
  +
|Manganese(II) Sulfide
  +
|MnS
  +
|3.99
  +
|0.94
  +
|
  +
|
  +
|-
  +
|Mercury
  +
|Hg
  +
|13.46
  +
|0.74
  +
|
  +
|
  +
|-
  +
|Molybdenum
  +
|Mo
  +
|10.2
  +
|0.257
  +
|
  +
|
  +
|-
  +
|Nickel
  +
|Ni
  +
|8.91
  +
|0.331
  +
|
  +
|Used often
  +
|-
  +
|Niobium
  +
|Nb
  +
|8.578
  +
|0.492
  +
|
  +
|
  +
|-
  +
|Niobium(V) Oxide
  +
|Nb<sub>2</sub>O<sub>5</sub>
  +
|4.47
  +
|*1.00
  +
|
  +
|*z ratio has not been established
  +
|-
  +
|Palladium
  +
|Pd
  +
|12.0
  +
|0.357
  +
|
  +
|
  +
|-
  +
|Platinum
  +
|Pt
  +
|21.4
  +
|0.245
  +
|
  +
|
  +
|-
  +
|Potasium Cloride
  +
|KCl
  +
|1.98
  +
|2.05
  +
|
  +
|
  +
|-
  +
|Selenium
  +
|Se
  +
|4.82
  +
|0.864
  +
|
  +
|
  +
|-
  +
|Silicon
  +
|Si
  +
|2.32
  +
|0.712
  +
|
  +
|
  +
|-
  +
|Silicon(II) Oxide
  +
|SiO
  +
|2.13
  +
|0.87
  +
|
  +
|
  +
|-
  +
|Silicon dioxide (fused quarz)
  +
|SiO<sub>2</sub>
  +
|2.20
  +
|1.07
  +
|
  +
|
  +
|-
  +
|Silver
  +
|Ag
  +
|10.5
  +
|0.529
  +
|
  +
|
  +
|-
  +
|Silver bromide
  +
|AgBr
  +
|6.47
  +
|1.18
  +
|
  +
|
  +
|-
  +
|Silver chloride
  +
|AgCl
  +
|5.56
  +
|1.32
  +
|
  +
|
  +
|-
  +
|Sodium
  +
|Na
  +
|0.97
  +
|4.8
  +
|
  +
|
  +
|-
  +
|Sodium chloride
  +
|NaCl
  +
|2.17
  +
|1.57
  +
|
  +
|
  +
|-
  +
|Tantalum
  +
|Ta
  +
|16.6
  +
|0.262
  +
|
  +
|
  +
|-
  +
|Tantalum(IV) oxide
  +
|Ta<sub>2</sub>O<sub>5</sub>
  +
|8.2
  +
|0.30
  +
|
  +
|
  +
|-
  +
|Tin
  +
|Sn
  +
|7.30
  +
|0.724
  +
|
  +
|Used often
  +
|-
  +
|Titanium
  +
|Ti
  +
|4.50
  +
|0.628
  +
|
  +
|Used often
  +
|-
  +
|Titanium (IV) Oxide
  +
|TiO<sub>2</sub>
  +
|4.26
  +
|0.40
  +
|
  +
|
  +
|-
  +
|Titanium Oxide
  +
|TiO
  +
|4.90
  +
|*1.00
  +
|
  +
|* z ratio not established
  +
|-
  +
|Tungsten
  +
|W
  +
|19.3
  +
|0.163
  +
|
  +
|
  +
|-
  +
|Tungsten carbide
  +
|WC
  +
|15.6
  +
|0.151
  +
|
  +
|
  +
|-
  +
|Zinc
  +
|Zn
  +
|7.04
  +
|0.514
  +
|
  +
|Used often
  +
|-
  +
|Zinc Oxide
  +
|ZnO
  +
|5.61
  +
|0.556
  +
|
  +
|
  +
|-
  +
|Zinc Sulfide
  +
|ZnS
  +
|4.09
  +
|0.775
  +
|
  +
|
  +
|-
  +
|Zirconium
  +
|Zr
  +
|6.51
  +
|0.60
  +
|
  +
|Should be 6.49
  +
|-
  +
|Zirconium Oxide
  +
|ZrO<sub>2</sub>
  +
|5.6
  +
|1.001
  +
|
  +
|
  +
|}
   
  +
== In Deposition (Thermal Evaporator 2) ==
−
= Materials Table =
  
  +
*[[media:Thermal evaporator 2-new Sheet1.pdf|Indium evaporation Data]]

Latest revision as of 17:00, 26 June 2018

Back to Vacuum Deposition Recipes.

Thermal Evaporator 1

Materials Table

Thermal Evaporator 2

Materials Table

In Deposition (Thermal Evaporator 2)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Thermal_Evaporation_Recipes&oldid=155225"