Thermal Evap 2 (Solder)
Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.
Wafers up to 12" can be mounted.
For the materials tables, please visit the Thermal Evaporation Recipe Page.