Difference between revisions of "Thermal Evap 2 (Solder)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 15: Line 15:
= Detailed Specifications =
= Detailed Specifications =
work on this page...
Wafers up to 12" can be mounted.

Revision as of 17:08, 16 March 2017

Thermal Evap 2 (Solder)
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description ?
Manufacturer Custom
Vacuum Deposition Recipes
Sign up for this tool


Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.

Detailed Specifications

Wafers up to 12" can be mounted.


Materials Table

For the materials tables, please visit the Thermal Evaporation Recipe Page.