Difference between revisions of "Thermal Evap 2 (Solder)"

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|picture=Thermal2.jpg
 
|picture=Thermal2.jpg
 
|type = Vacuum Deposition
 
|type = Vacuum Deposition
|super= Brian Lingg
+
|super= Don Freeborn
 
|location=Bay 3
 
|location=Bay 3
 
|description = ?
 
|description = ?
Line 10: Line 10:
 
}}
 
}}
  
= About  =
+
== About  ==
 +
 +
Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. See the Recipes section below for other materials used.
  
= Materials Table =
+
Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.
  
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable"
+
== Detailed Specifications ==
|-
+
Wafers up to 12" can be mounted.
! colspan=6 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
+
 
|- bgcolor="#D0E7FF"
+
==Documentation==
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
+
*[//wiki.nanotech.ucsb.edu/w/images/b/b3/Thermal_Evaporator2.pdf Operating Instructions]
! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol'''
+
 
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
+
== Recipes ==
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
+
* [[Thermal Evaporation Recipes#Thermal Evaporator 2|Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2]]
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %'''
+
** ''Visit this page for the materials table and evaporation parameters for all materials available.''
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
 
|-
 
|Aluminum
 
|Al
 
|2.70
 
|1.08
 
|
 
|
 
|-
 
|Antimony
 
|Sb
 
|6.620
 
|0.768
 
|
 
|
 
|-
 
|Arsenic
 
|As
 
|5.73
 
|0.996
 
|
 
|
 
|-
 
|Beryllium
 
|Be
 
|1.85
 
|0.543
 
|
 
|
 
|-
 
|Boron
 
|B
 
|2.54
 
|0.389
 
|
 
|
 
|-
 
|Cadmium
 
|Cd
 
|8.64
 
|0.682
 
|
 
|
 
|-
 
|Cadmium sulfide
 
|CdS
 
|4.83
 
|1.02
 
|
 
|
 
|-
 
|Cadmium telluride
 
|CdTe
 
|5.85
 
|0.980
 
|
 
|
 
|-
 
|Calcium fluoride
 
|CaF<sub>2</sub>
 
|3.18
 
|0.775
 
|
 
|Used often
 
|-
 
|Carbon (graphite)
 
|C
 
|2.25
 
|3.26
 
|
 
|
 
|-
 
|Chromium
 
|Cr
 
|7.20
 
|0.305
 
|155
 
|Used often
 
|-
 
|Cobalt
 
|Co
 
|8.71
 
|0.343
 
|
 
|
 
|-
 
|Copper
 
|Cu
 
|8.93
 
|0.437
 
|
 
|
 
|-
 
|Gallium
 
|Ga
 
|5.93
 
|0.593
 
|
 
|
 
|-
 
|Gallium Arsenide
 
|GaAs
 
|5.31
 
|1.59
 
|
 
|
 
|-
 
|Germanium
 
|Ge
 
|5.35
 
|0.516
 
|
 
|
 
|-
 
|Gold
 
|Au
 
|19.30
 
|0.381
 
|
 
|Used often
 
|-
 
|Indium
 
|In
 
|7.30
 
|0.841
 
|120
 
|Used often
 
|-
 
|Indium antimonide
 
|InSb
 
|5.76
 
|0.769
 
|
 
|
 
|-
 
|Iridium
 
|Ir
 
|22.4
 
|0.129
 
|
 
|
 
|-
 
|Iron
 
|Fe
 
|7.86
 
|0.349
 
|
 
|
 
|-
 
|Lead
 
|Pb
 
|11.3
 
|1.13
 
|
 
|
 
|-
 
|Lead sulfide
 
|PbS
 
|7.50
 
|0.566
 
|
 
|
 
|-
 
|Lithium fluoride
 
|LiF
 
|2.638
 
|0.778
 
|
 
|
 
|-
 
|Magnesium
 
|Mg
 
|1.74
 
|1.61
 
|
 
|
 
|-
 
|Magnesium oxide
 
|MgO
 
|3.58
 
|0.411
 
|
 
|
 
|-
 
|Magnesium Fluoride
 
|MgF<sub>2</sub>
 
|3.00 ( should be 3.18)
 
|0.427( should be 0.637)
 
|
 
|
 
|-
 
|Manganese
 
|Mn
 
|7.20
 
|0.377
 
|
 
|
 
|-
 
|Manganese(II) Sulfide
 
|MnS
 
|3.99
 
|0.94
 
|
 
|
 
|-
 
|Mercury
 
|Hg
 
|13.46
 
|0.74
 
|
 
|
 
|-
 
|Molybdenum
 
|Mo
 
|10.2
 
|0.257
 
|
 
|
 
|-
 
|Nickel
 
|Ni
 
|8.91
 
|0.331
 
|
 
|Used often
 
|-
 
|Niobium
 
|Nb
 
|8.578
 
|0.492
 
|
 
|
 
|-
 
|Niobium(V) Oxide
 
|Nb<sub>2</sub>O<sub>5</sub>
 
|4.47
 
|*1.00
 
|
 
|*z ratio has not been established
 
|-
 
|Palladium
 
|Pd
 
|12.0
 
|0.357
 
|
 
|
 
|-
 
|Platinum
 
|Pt
 
|21.4
 
|0.245
 
|
 
|
 
|-
 
|Potasium Cloride
 
|KCl
 
|1.98
 
|2.05
 
|
 
|
 
|-
 
|Selenium
 
|Se
 
|4.82
 
|0.864
 
|
 
|
 
|-
 
|Silicon
 
|Si
 
|2.32
 
|0.712
 
|
 
|
 
|-
 
|Silicon(II) Oxide
 
|SiO
 
|2.13
 
|0.87
 
|
 
|
 
|-
 
|Silicon dioxide (fused quarz)
 
|SiO<sub>2</sub>
 
|2.20
 
|1.07
 
|
 
|
 
|-
 
|Silver
 
|Ag
 
|10.5
 
|0.529
 
|
 
|
 
|-
 
|Silver bromide
 
|AgBr
 
|6.47
 
|1.18
 
|
 
|
 
|-
 
|Silver chloride
 
|AgCl
 
|5.56
 
|1.32
 
|
 
|
 
|-
 
|Sodium
 
|Na
 
|0.97
 
|4.8
 
|
 
|
 
|-
 
|Sodium chloride
 
|NaCl
 
|2.17
 
|1.57
 
|
 
|
 
|-
 
|Tantalum
 
|Ta
 
|16.6
 
|0.262
 
|
 
|
 
|-
 
|Tantalum(IV) oxide
 
|Ta<sub>2</sub>O<sub>5</sub>
 
|8.2
 
|0.30
 
|
 
|
 
|-
 
|Tin
 
|Sn
 
|7.30
 
|0.724
 
|
 
|Used often
 
|-
 
|Titanium
 
|Ti
 
|4.50
 
|0.628
 
|
 
|Used often
 
|-
 
|Titanium (IV) Oxide
 
|TiO<sub>2</sub>
 
|4.26
 
|0.40
 
|
 
|
 
|-
 
|Titanium Oxide
 
|TiO
 
|4.90
 
|*1.00
 
|
 
|* z ratio not established
 
|-
 
|Tungsten
 
|W
 
|19.3
 
|0.163
 
|
 
|
 
|-
 
|Tungsten carbide
 
|WC
 
|15.6
 
|0.151
 
|
 
|
 
|-
 
|Zinc
 
|Zn
 
|7.04
 
|0.514
 
|
 
|Used often
 
|-
 
|Zinc Oxide
 
|ZnO
 
|5.61
 
|0.556
 
|
 
|
 
|-
 
|Zinc Sulfide
 
|ZnS
 
|4.09
 
|0.775
 
|
 
|
 
|-
 
|Zirconium
 
|Zr
 
|6.51
 
|0.60
 
|
 
|Should be 6.49
 
|-
 
|Zirconium Oxide
 
|ZrO<sub>2</sub>
 
|5.6
 
|1.001
 
|
 
|
 
|-
 

Latest revision as of 08:27, 19 May 2020

Thermal Evap 2 (Solder)
Thermal2.jpg
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Don Freeborn
Supervisor Phone (805) 893-7975
Supervisor E-Mail dfreeborn@ece.ucsb.edu
Description ?
Manufacturer Custom
Vacuum Deposition Recipes
Sign up for this tool



About

Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. See the Recipes section below for other materials used.

Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.

Detailed Specifications

Wafers up to 12" can be mounted.

Documentation

Recipes