Difference between revisions of "Thermal Evap 2 (Solder)"
Jump to navigation
Jump to search
m (→About) |
|||
(5 intermediate revisions by 4 users not shown) | |||
Line 2: | Line 2: | ||
|picture=Thermal2.jpg |
|picture=Thermal2.jpg |
||
|type = Vacuum Deposition |
|type = Vacuum Deposition |
||
− | |super= |
+ | |super= Don Freeborn |
|location=Bay 3 |
|location=Bay 3 |
||
|description = ? |
|description = ? |
||
Line 10: | Line 10: | ||
}} |
}} |
||
− | = About = |
+ | == About == |
+ | Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. See the Recipes section below for other materials used. |
||
− | write something... |
||
+ | Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators. |
||
⚫ | |||
− | work on this page... |
||
⚫ | |||
⚫ | |||
+ | Wafers up to 12" can be mounted. |
||
− | *[[ media: Thermal Evaporator2.pdf|Operating Instructions]] |
||
⚫ | |||
− | = Materials Table = |
||
+ | *[//wiki.nanotech.ucsb.edu/w/images/b/b3/Thermal_Evaporator2.pdf Operating Instructions] |
||
− | For the materials tables, please visit the [[Thermal_Evaporation_Recipes#Materials_Table_(Thermal Evaporator #1)|Thermal Evaporation Recipe Page]]. |
||
+ | |||
+ | == Recipes == |
||
+ | * [[Thermal Evaporation Recipes#Thermal Evaporator 2|Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2]] |
||
+ | ** ''Visit this page for the materials table and evaporation parameters for all materials available.'' |
Revision as of 09:27, 19 May 2020
|
About
Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. See the Recipes section below for other materials used.
Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.
Detailed Specifications
Wafers up to 12" can be mounted.
Documentation
Recipes
- Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2
- Visit this page for the materials table and evaporation parameters for all materials available.