Difference between revisions of "Thermal Evap 2 (Solder)"
Jump to navigation
Jump to search
m (→About) |
|||
| (6 intermediate revisions by 4 users not shown) | |||
| Line 2: | Line 2: | ||
|picture=Thermal2.jpg |
|picture=Thermal2.jpg |
||
|type = Vacuum Deposition |
|type = Vacuum Deposition |
||
| − | |super= |
+ | |super= Don Freeborn |
|location=Bay 3 |
|location=Bay 3 |
||
|description = ? |
|description = ? |
||
| Line 10: | Line 10: | ||
}} |
}} |
||
| − | = About = |
+ | == About == |
| + | Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. See the Recipes section below for other materials used. |
||
| − | write something... |
||
| + | Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators. |
||
| − | = Detailed Specifications = |
||
| − | work on this page... |
||
| + | == Detailed Specifications == |
||
| − | =Documentation= |
||
| + | Wafers up to 12" can be mounted. |
||
| − | *[[ media: Thermal Evaporator2.pdf|Operating Instructions]] |
||
| + | ==Documentation== |
||
| − | = Materials Table = |
||
| + | *[//wiki.nanotech.ucsb.edu/w/images/b/b3/Thermal_Evaporator2.pdf Operating Instructions] |
||
| + | == Recipes == |
||
| − | {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
||
| + | * [[Thermal Evaporation Recipes#Thermal Evaporator 2|Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2]] |
||
| − | |- |
||
| + | ** ''Visit this page for the materials table and evaporation parameters for all materials available.'' |
||
| − | ! colspan=6 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
||
| − | |- bgcolor="#D0E7FF" |
||
| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Material''' |
||
| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol''' |
||
| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3''' |
||
| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio''' |
||
| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %''' |
||
| − | ! width="100" bgcolor="#D0E7FF" align="center" | '''Comments''' |
||
| − | |- |
||
| − | |Aluminum |
||
| − | |Al |
||
| − | |2.70 |
||
| − | |1.08 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Antimony |
||
| − | |Sb |
||
| − | |6.620 |
||
| − | |0.768 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Arsenic |
||
| − | |As |
||
| − | |5.73 |
||
| − | |0.996 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Beryllium |
||
| − | |Be |
||
| − | |1.85 |
||
| − | |0.543 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Boron |
||
| − | |B |
||
| − | |2.54 |
||
| − | |0.389 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Cadmium |
||
| − | |Cd |
||
| − | |8.64 |
||
| − | |0.682 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Cadmium sulfide |
||
| − | |CdS |
||
| − | |4.83 |
||
| − | |1.02 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Cadmium telluride |
||
| − | |CdTe |
||
| − | |5.85 |
||
| − | |0.980 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Calcium fluoride |
||
| − | |CaF<sub>2</sub> |
||
| − | |3.18 |
||
| − | |0.775 |
||
| − | | |
||
| − | |Used often |
||
| − | |- |
||
| − | |Carbon (graphite) |
||
| − | |C |
||
| − | |2.25 |
||
| − | |3.26 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Chromium |
||
| − | |Cr |
||
| − | |7.20 |
||
| − | |0.305 |
||
| − | |155 |
||
| − | |Used often |
||
| − | |- |
||
| − | |Cobalt |
||
| − | |Co |
||
| − | |8.71 |
||
| − | |0.343 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Copper |
||
| − | |Cu |
||
| − | |8.93 |
||
| − | |0.437 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Gallium |
||
| − | |Ga |
||
| − | |5.93 |
||
| − | |0.593 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Gallium Arsenide |
||
| − | |GaAs |
||
| − | |5.31 |
||
| − | |1.59 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Germanium |
||
| − | |Ge |
||
| − | |5.35 |
||
| − | |0.516 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Gold |
||
| − | |Au |
||
| − | |19.30 |
||
| − | |0.381 |
||
| − | | |
||
| − | |Used often |
||
| − | |- |
||
| − | |Indium |
||
| − | |In |
||
| − | |7.30 |
||
| − | |0.841 |
||
| − | |120 |
||
| − | |Used often |
||
| − | |- |
||
| − | |Indium antimonide |
||
| − | |InSb |
||
| − | |5.76 |
||
| − | |0.769 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Iridium |
||
| − | |Ir |
||
| − | |22.4 |
||
| − | |0.129 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Iron |
||
| − | |Fe |
||
| − | |7.86 |
||
| − | |0.349 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Lead |
||
| − | |Pb |
||
| − | |11.3 |
||
| − | |1.13 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Lead sulfide |
||
| − | |PbS |
||
| − | |7.50 |
||
| − | |0.566 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Lithium fluoride |
||
| − | |LiF |
||
| − | |2.638 |
||
| − | |0.778 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Magnesium |
||
| − | |Mg |
||
| − | |1.74 |
||
| − | |1.61 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Magnesium oxide |
||
| − | |MgO |
||
| − | |3.58 |
||
| − | |0.411 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Magnesium Fluoride |
||
| − | |MgF<sub>2</sub> |
||
| − | |3.00 ( should be 3.18) |
||
| − | |0.427( should be 0.637) |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Manganese |
||
| − | |Mn |
||
| − | |7.20 |
||
| − | |0.377 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Manganese(II) Sulfide |
||
| − | |MnS |
||
| − | |3.99 |
||
| − | |0.94 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Mercury |
||
| − | |Hg |
||
| − | |13.46 |
||
| − | |0.74 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Molybdenum |
||
| − | |Mo |
||
| − | |10.2 |
||
| − | |0.257 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Nickel |
||
| − | |Ni |
||
| − | |8.91 |
||
| − | |0.331 |
||
| − | | |
||
| − | |Used often |
||
| − | |- |
||
| − | |Niobium |
||
| − | |Nb |
||
| − | |8.578 |
||
| − | |0.492 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Niobium(V) Oxide |
||
| − | |Nb<sub>2</sub>O<sub>5</sub> |
||
| − | |4.47 |
||
| − | |*1.00 |
||
| − | | |
||
| − | |*z ratio has not been established |
||
| − | |- |
||
| − | |Palladium |
||
| − | |Pd |
||
| − | |12.0 |
||
| − | |0.357 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Platinum |
||
| − | |Pt |
||
| − | |21.4 |
||
| − | |0.245 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Potasium Cloride |
||
| − | |KCl |
||
| − | |1.98 |
||
| − | |2.05 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Selenium |
||
| − | |Se |
||
| − | |4.82 |
||
| − | |0.864 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Silicon |
||
| − | |Si |
||
| − | |2.32 |
||
| − | |0.712 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Silicon(II) Oxide |
||
| − | |SiO |
||
| − | |2.13 |
||
| − | |0.87 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Silicon dioxide (fused quarz) |
||
| − | |SiO<sub>2</sub> |
||
| − | |2.20 |
||
| − | |1.07 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Silver |
||
| − | |Ag |
||
| − | |10.5 |
||
| − | |0.529 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Silver bromide |
||
| − | |AgBr |
||
| − | |6.47 |
||
| − | |1.18 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Silver chloride |
||
| − | |AgCl |
||
| − | |5.56 |
||
| − | |1.32 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Sodium |
||
| − | |Na |
||
| − | |0.97 |
||
| − | |4.8 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Sodium chloride |
||
| − | |NaCl |
||
| − | |2.17 |
||
| − | |1.57 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Tantalum |
||
| − | |Ta |
||
| − | |16.6 |
||
| − | |0.262 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Tantalum(IV) oxide |
||
| − | |Ta<sub>2</sub>O<sub>5</sub> |
||
| − | |8.2 |
||
| − | |0.30 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Tin |
||
| − | |Sn |
||
| − | |7.30 |
||
| − | |0.724 |
||
| − | | |
||
| − | |Used often |
||
| − | |- |
||
| − | |Titanium |
||
| − | |Ti |
||
| − | |4.50 |
||
| − | |0.628 |
||
| − | | |
||
| − | |Used often |
||
| − | |- |
||
| − | |Titanium (IV) Oxide |
||
| − | |TiO<sub>2</sub> |
||
| − | |4.26 |
||
| − | |0.40 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Titanium Oxide |
||
| − | |TiO |
||
| − | |4.90 |
||
| − | |*1.00 |
||
| − | | |
||
| − | |* z ratio not established |
||
| − | |- |
||
| − | |Tungsten |
||
| − | |W |
||
| − | |19.3 |
||
| − | |0.163 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Tungsten carbide |
||
| − | |WC |
||
| − | |15.6 |
||
| − | |0.151 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Zinc |
||
| − | |Zn |
||
| − | |7.04 |
||
| − | |0.514 |
||
| − | | |
||
| − | |Used often |
||
| − | |- |
||
| − | |Zinc Oxide |
||
| − | |ZnO |
||
| − | |5.61 |
||
| − | |0.556 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Zinc Sulfide |
||
| − | |ZnS |
||
| − | |4.09 |
||
| − | |0.775 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Zirconium |
||
| − | |Zr |
||
| − | |6.51 |
||
| − | |0.60 |
||
| − | | |
||
| − | |Should be 6.49 |
||
| − | |- |
||
| − | |Zirconium Oxide |
||
| − | |ZrO<sub>2</sub> |
||
| − | |5.6 |
||
| − | |1.001 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
Revision as of 09:27, 19 May 2020
| |||||||||||||||||||||
About
Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. See the Recipes section below for other materials used.
Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.
Detailed Specifications
Wafers up to 12" can be mounted.
Documentation
Recipes
- Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2
- Visit this page for the materials table and evaporation parameters for all materials available.