Difference between revisions of "Thermal Evap 2 (Solder)"
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|picture=Thermal2.jpg |
|picture=Thermal2.jpg |
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|type = Vacuum Deposition |
|type = Vacuum Deposition |
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| − | |super= |
+ | |super= Don Freeborn |
|location=Bay 3 |
|location=Bay 3 |
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|description = ? |
|description = ? |
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}} |
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| − | = About = |
+ | == About == |
| + | Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. See the Recipes section below for other materials used. |
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| − | write something... |
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| + | Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators. |
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| − | = Materials Table = |
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| − | Work on this page... For the materials tables, please visit the [[E-Beam_Evaporation_Recipes#Materials_Table_(E-Beam #1)|E-Beam Recipe Page]]. |
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| − | = Detailed Specifications = |
+ | == Detailed Specifications == |
| + | Wafers up to 12" can be mounted. |
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| − | work on this page... |
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| − | =Documentation= |
+ | ==Documentation== |
| − | *[ |
+ | *[//wiki.nanotech.ucsb.edu/w/images/b/b3/Thermal_Evaporator2.pdf Operating Instructions] |
| + | == Recipes == |
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| − | |||
| + | * [[Thermal Evaporation Recipes#Thermal Evaporator 2|Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2]] |
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| − | |||
| + | ** ''Visit this page for the materials table and evaporation parameters for all materials available.'' |
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| − | |||
| − | = Materials Table = |
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| − | |||
| − | {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
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| − | |- |
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| − | ! colspan=6 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
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| − | |- bgcolor="#D0E7FF" |
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| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Material''' |
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| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol''' |
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| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3''' |
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| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio''' |
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| − | ! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %''' |
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| − | ! width="100" bgcolor="#D0E7FF" align="center" | '''Comments''' |
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| − | |- |
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| − | |Aluminum |
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| − | |Al |
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| − | |2.70 |
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| − | |1.08 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Antimony |
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| − | |Sb |
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| − | |6.620 |
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| − | |0.768 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Arsenic |
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| − | |As |
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| − | |5.73 |
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| − | |0.996 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Beryllium |
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| − | |Be |
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| − | |1.85 |
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| − | |0.543 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Boron |
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| − | |B |
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| − | |2.54 |
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| − | |0.389 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Cadmium |
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| − | |Cd |
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| − | |8.64 |
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| − | |0.682 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Cadmium sulfide |
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| − | |CdS |
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| − | |4.83 |
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| − | |1.02 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Cadmium telluride |
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| − | |CdTe |
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| − | |5.85 |
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| − | |0.980 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Calcium fluoride |
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| − | |CaF<sub>2</sub> |
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| − | |3.18 |
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| − | |0.775 |
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| − | | |
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| − | |Used often |
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| − | |- |
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| − | |Carbon (graphite) |
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| − | |C |
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| − | |2.25 |
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| − | |3.26 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Chromium |
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| − | |Cr |
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| − | |7.20 |
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| − | |0.305 |
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| − | |155 |
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| − | |Used often |
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| − | |- |
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| − | |Cobalt |
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| − | |Co |
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| − | |8.71 |
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| − | |0.343 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Copper |
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| − | |Cu |
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| − | |8.93 |
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| − | |0.437 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Gallium |
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| − | |Ga |
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| − | |5.93 |
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| − | |0.593 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Gallium Arsenide |
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| − | |GaAs |
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| − | |5.31 |
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| − | |1.59 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Germanium |
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| − | |Ge |
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| − | |5.35 |
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| − | |0.516 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Gold |
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| − | |Au |
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| − | |19.30 |
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| − | |0.381 |
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| − | | |
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| − | |Used often |
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| − | |- |
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| − | |Indium |
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| − | |In |
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| − | |7.30 |
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| − | |0.841 |
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| − | |120 |
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| − | |Used often |
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| − | |- |
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| − | |Indium antimonide |
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| − | |InSb |
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| − | |5.76 |
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| − | |0.769 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Iridium |
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| − | |Ir |
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| − | |22.4 |
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| − | |0.129 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Iron |
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| − | |Fe |
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| − | |7.86 |
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| − | |0.349 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Lead |
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| − | |Pb |
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| − | |11.3 |
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| − | |1.13 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Lead sulfide |
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| − | |PbS |
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| − | |7.50 |
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| − | |0.566 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Lithium fluoride |
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| − | |LiF |
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| − | |2.638 |
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| − | |0.778 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Magnesium |
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| − | |Mg |
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| − | |1.74 |
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| − | |1.61 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Magnesium oxide |
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| − | |MgO |
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| − | |3.58 |
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| − | |0.411 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Magnesium Fluoride |
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| − | |MgF<sub>2</sub> |
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| − | |3.00 ( should be 3.18) |
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| − | |0.427( should be 0.637) |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Manganese |
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| − | |Mn |
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| − | |7.20 |
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| − | |0.377 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Manganese(II) Sulfide |
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| − | |MnS |
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| − | |3.99 |
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| − | |0.94 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Mercury |
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| − | |Hg |
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| − | |13.46 |
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| − | |0.74 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Molybdenum |
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| − | |Mo |
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| − | |10.2 |
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| − | |0.257 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Nickel |
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| − | |Ni |
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| − | |8.91 |
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| − | |0.331 |
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| − | | |
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| − | |Used often |
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| − | |- |
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| − | |Niobium |
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| − | |Nb |
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| − | |8.578 |
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| − | |0.492 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Niobium(V) Oxide |
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| − | |Nb<sub>2</sub>O<sub>5</sub> |
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| − | |4.47 |
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| − | |*1.00 |
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| − | | |
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| − | |*z ratio has not been established |
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| − | |- |
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| − | |Palladium |
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| − | |Pd |
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| − | |12.0 |
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| − | |0.357 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Platinum |
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| − | |Pt |
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| − | |21.4 |
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| − | |0.245 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Potasium Cloride |
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| − | |KCl |
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| − | |1.98 |
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| − | |2.05 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Selenium |
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| − | |Se |
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| − | |4.82 |
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| − | |0.864 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Silicon |
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| − | |Si |
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| − | |2.32 |
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| − | |0.712 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Silicon(II) Oxide |
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| − | |SiO |
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| − | |2.13 |
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| − | |0.87 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Silicon dioxide (fused quarz) |
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| − | |SiO<sub>2</sub> |
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| − | |2.20 |
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| − | |1.07 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Silver |
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| − | |Ag |
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| − | |10.5 |
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| − | |0.529 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Silver bromide |
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| − | |AgBr |
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| − | |6.47 |
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| − | |1.18 |
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| − | | |
||
| − | | |
||
| − | |- |
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| − | |Silver chloride |
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| − | |AgCl |
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| − | |5.56 |
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| − | |1.32 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Sodium |
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| − | |Na |
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| − | |0.97 |
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| − | |4.8 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Sodium chloride |
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| − | |NaCl |
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| − | |2.17 |
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| − | |1.57 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Tantalum |
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| − | |Ta |
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| − | |16.6 |
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| − | |0.262 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Tantalum(IV) oxide |
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| − | |Ta<sub>2</sub>O<sub>5</sub> |
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| − | |8.2 |
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| − | |0.30 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Tin |
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| − | |Sn |
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| − | |7.30 |
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| − | |0.724 |
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| − | | |
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| − | |Used often |
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| − | |- |
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| − | |Titanium |
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| − | |Ti |
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| − | |4.50 |
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| − | |0.628 |
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| − | | |
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| − | |Used often |
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| − | |- |
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| − | |Titanium (IV) Oxide |
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| − | |TiO<sub>2</sub> |
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| − | |4.26 |
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| − | |0.40 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Titanium Oxide |
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| − | |TiO |
||
| − | |4.90 |
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| − | |*1.00 |
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| − | | |
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| − | |* z ratio not established |
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| − | |- |
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| − | |Tungsten |
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| − | |W |
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| − | |19.3 |
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| − | |0.163 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Tungsten carbide |
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| − | |WC |
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| − | |15.6 |
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| − | |0.151 |
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| − | | |
||
| − | | |
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| − | |- |
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| − | |Zinc |
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| − | |Zn |
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| − | |7.04 |
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| − | |0.514 |
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| − | | |
||
| − | |Used often |
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| − | |- |
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| − | |Zinc Oxide |
||
| − | |ZnO |
||
| − | |5.61 |
||
| − | |0.556 |
||
| − | | |
||
| − | | |
||
| − | |- |
||
| − | |Zinc Sulfide |
||
| − | |ZnS |
||
| − | |4.09 |
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| − | |0.775 |
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| − | | |
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| − | | |
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| − | |- |
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| − | |Zirconium |
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| − | |Zr |
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| − | |6.51 |
||
| − | |0.60 |
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| − | | |
||
| − | |Should be 6.49 |
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| − | |- |
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| − | |Zirconium Oxide |
||
| − | |ZrO<sub>2</sub> |
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| − | |5.6 |
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| − | |1.001 |
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| − | | |
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| − | | |
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| − | |- |
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Revision as of 09:27, 19 May 2020
| |||||||||||||||||||||
About
Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. See the Recipes section below for other materials used.
Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.
Detailed Specifications
Wafers up to 12" can be mounted.
Documentation
Recipes
- Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2
- Visit this page for the materials table and evaporation parameters for all materials available.