Difference between revisions of "Thermal Evap 2 (Solder)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(fixed link to recipes, removed duplicate link)
Line 10: Line 10:
 
}}
 
}}
  
= About  =
+
== About  ==
 
   
 
   
Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin. Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.
+
Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin.  
  
= Detailed Specifications =
+
Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.
 +
 
 +
== Detailed Specifications ==
 
Wafers up to 12" can be mounted.
 
Wafers up to 12" can be mounted.
  
=Documentation=
+
==Documentation==
*[[ media: Thermal Evaporator2.pdf|Operating Instructions]]
+
*[//wiki.nanotech.ucsb.edu/w/images/b/b3/Thermal_Evaporator2.pdf Operating Instructions]
  
= Materials Table =
+
== Recipes ==
For the materials tables, please visit the [[Thermal_Evaporation_Recipes#Materials_Table_(Thermal Evaporator #1)|Thermal Evaporation Recipe Page]].
+
* [[Thermal Evaporation Recipes#Thermal Evaporator 2|Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2]]  
==Data==
+
** ''Visit this page for the materials tables and evaporation parameters.''
[[Thermal Evaporation Recipes]]
 

Revision as of 09:26, 19 May 2020

Thermal Evap 2 (Solder)
Thermal2.jpg
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Don Freeborn
Supervisor Phone (805) 893-7975
Supervisor E-Mail dfreeborn@ece.ucsb.edu
Description ?
Manufacturer Custom
Vacuum Deposition Recipes
Sign up for this tool



About

Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin.

Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.

Detailed Specifications

Wafers up to 12" can be mounted.

Documentation

Recipes