Difference between revisions of "Test Data of etching SiO2 with CHF3/CF4-ICP1"

Revision as of 10:24, 11 May 2022

**ICP#1 Recipe:** 0.5Pa, 50/900W, CHF3/CF4=10/30 sccm, time=210 sec
Date	Sample#	Etch Rate (nm/min)	Etch Selectivity (SiO2/PR)	Averaged Sidewall Angle (^o)	SEM Images
5/10/2022	NP_ICP1_07	146	1.34		[1] [2]
4/26/2022	NP_ICP1_06	139.4	1.36		[1] [2]
4/20/2022	NP_ICP1_05	140	1.13		[1] [2]
4/13/2022	NP_ICP1_04	140.3	1.24		[1] [2]
3/29/2022	NP_ICP1_03	136.9	1.19		[1][2]
3/8/2022	NP_ICP1_02	133.7	1.12		[1] [2]
3/2/2022	NP_ICP1_01	141.4	1.20		[1] [2]
1/7/2021	I12101	118	1.12		[1]
3/3/2020	I12004	110	1.05		[2]
Sidewall profile on 2/28/2020 etches is slanted, chamber will be wet-cleaned on 3/2/2020 and re-tested. Data for 3/3 shows etch returned to "normal".
2/28/2020	I12003	119	1.17	56.6	[3]
1/23/2020	I12002	109	1.16		[4]
Rate on 1/13/2020 is low by ~20%, so chamber was wet-cleaned on 1/21/2020. Data below for 1/23 shows rate returned to "normal".
1/13/2020	I12001	78.0	1.06	unusual - two regions	[5]
5/29/2019	I11903	105	1.41		[6]
1/28/2019	I11901	110	1.35	see SEM →	[7]

Alternate SiO₂ etch recipe with O2 included.

@@ Line 9: / Line 9: @@
 |'''Averaged  Sidewall Angle (<sup>o</sup>)'''
 |'''SEM Images'''
+|-
+|5/10/2022
+|NP_ICP1_07
+|146
+|1.34
+|
+|[https://wiki.nanotech.ucsb.edu/w/images/a/a4/ICP1_07_45D_008.jpg <nowiki>[1]</nowiki>] [https://wiki.nanotech.ucsb.edu/w/images/a/a7/ICP1_07_CS_006.jpg <nowiki>[2]</nowiki>]
 |-
 |4/26/2022
 |NP_ICP1_06
 |139.4
+|1.36
-|
 |
 |[https://wiki.nanotech.ucsb.edu/w/images/5/56/ICP1_06_45D_002.jpg <nowiki>[1]</nowiki>] [https://wiki.nanotech.ucsb.edu/w/images/4/49/ICP1_06_CS_002.jpg <nowiki>[2]</nowiki>]
@@ Line 20: / Line 27: @@
 |NP_ICP1_05
 |140
+|1.13
-|
 |
 |[https://wiki.nanotech.ucsb.edu/w/images/7/74/ICP1_05_45D_001.jpg <nowiki>[1]</nowiki>] [https://wiki.nanotech.ucsb.edu/w/images/7/72/ICP1_05_CS_002.jpg <nowiki>[2]</nowiki>]
@@ Line 27: / Line 34: @@
 |NP_ICP1_04
 |140.3
+|1.24
-|
 |
 |[https://wiki.nanotech.ucsb.edu/w/images/9/98/ICP1_004_45D_004.jpg <nowiki>[1]</nowiki>] [https://wiki.nanotech.ucsb.edu/w/images/4/45/ICP1_004_CS_001.jpg <nowiki>[2]</nowiki>]