Difference between revisions of "Test Data of etching SiO2 with CHF3/CF4-ICP1"
Jump to navigation
Jump to search
(adding data) |
(adding a pic) |
||
Line 36: | Line 36: | ||
|1.16 |
|1.16 |
||
| |
| |
||
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/d/d4/I1200211.pdf] |
||
− | | |
||
|} |
|} |