Difference between revisions of "Test Data of etching SiO2 with CHF3/CF4-ICP1"
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|[https://wiki.nanotech.ucsb.edu/wiki/images/b/bb/I1200107.pdf] |
|[https://wiki.nanotech.ucsb.edu/wiki/images/b/bb/I1200107.pdf] |
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+ | |1/23/2020 |
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+ | |I12002 |
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+ | |109 |
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+ | |1.16 |
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