Information for "Test Data of etching SiO2 with CHF3/CF4-ICP1"

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Display titleTest Data of etching SiO2 with CHF3/CF4-ICP1
Default sort keyTest Data of etching SiO2 with CHF3/CF4-ICP1
Page length (in bytes)3,519
Page ID63417
Page content languageen - English
Page content modelwikitext
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Page creatorNingcao (talk | contribs)
Date of page creation12:09, 29 January 2019
Latest editorNoahdutra (talk | contribs)
Date of latest edit18:11, 29 July 2022
Total number of edits38
Total number of distinct authors5
Recent number of edits (within past 90 days)1
Recent number of distinct authors1