Information for "Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher"

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Display titleTest Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher
Default sort keyTest Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher
Page length (in bytes)5,634
Page ID63844
Page content languageen - English
Page content modelwikitext
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Page creatorNingcao (talk | contribs)
Date of page creation15:14, 4 February 2021
Latest editorNoahdutra (talk | contribs)
Date of latest edit17:18, 21 November 2022
Total number of edits31
Total number of distinct authors4
Recent number of edits (within past 90 days)10
Recent number of distinct authors1