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''Equipment Status''
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''Publications using the Nanofab''
 
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SEE THE BOTTOM OF THIS PAGE FOR INSTRUCTIONS ON ADDING NEWS ITEMS.
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SEE THE BOTTOM OF THIS PAGE FOR INSTRUCTIONS ON ADDING ITEMS.
 
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<!------------- Select Publications ---------------->
  
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== [https://opg.optica.org/abstract.cfm?uri=CLEO_SI-2022-SF3O.1 250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides] ==
 +
''Debapam Bose, Jiawei Wang, and Daniel J. Blumenthal''
  
== Quantum supremacy using a programmable superconducting processor ==
+
[https://doi.org/10.1364/CLEO_SI.2022.SF3O.1 Conference on Lasers and Electro-Optics (CLEO), Technical Digest Series (Optica Publishing Group, 2022), paper SF3O.1]
Frank Arute, K. Arya, ... Harmut Neven, John M. Martinis
 
  
[https://www.nature.com/articles/s41586-019-1666-5 Nature volume 574, pages505–510(2019)]
+
== [https://doi.org/10.1109/TED.2021.3057598 0.5T0.5R—An Ultracompact RRAM Cell Uniquely Enabled by van der Waals Heterostructures] ==
 +
''D. Zhang, C. -H. Yeh, W. Cao and K. Banerjee''
  
== Quantum supremacy using a programmable superconducting processor ==
+
[https://doi.org/10.1109/TED.2021.3057598 IEEE Transactions on Electron Devices, '''68''' (4), 2033-2040 (2021)]
Frank Arute, K. Arya, ... Harmut Neven, John M. Martinis
 
  
[https://www.nature.com/articles/s41586-019-1666-5 Nature volume 574, pages505–510(2019)]
+
== [https://doi.org/10.1126/science.abh2076 Laser soliton microcombs heterogeneously integrated on silicon] ==
 +
''Chao Xiang, Junqiu Liu, .... Bowers, J.''
 +
 
 +
[https://doi.org/10.1126/science.abh2076 Science, '''373''' (650), 99-103 (2021)]
 +
 
 +
== [https://doi.org/10.1103/PRXQuantum.2.010337 Ultrabright Entangled-Photon-Pair Generation from an AlGaAs-On-Insulator Microring Resonator] ==
 +
''Trevor J. Steiner, Joshua E. Castro, Lin Chang ... John E. Bowers, and Galan Moody''
 +
 
 +
[https://doi.org/10.1103/PRXQuantum.2.010337 PRX Quantum, '''2''' 010337 (2021)]
 +
 
 +
== [https://doi.org/10.1038/s41467-021-24926-8 Visible light photonic integrated Brillouin laser] ==
 +
''Chauhan, N., Isichenko, A., Liu, K. ... Blumenthal, D.''
 +
 
 +
[https://doi.org/10.1038/s41467-021-24926-8 Nature Communications, '''12''', p.4685 (2021)]
 +
 
 +
== [https://doi.org/10.1038/s41566-021-00831-w Optically synchronized fibre links using spectrally pure chip-scale lasers] ==
 +
''Brodnik, G.M., Harrington, M.W., Dallyn, J.H. .... Blumenthal, D.''
 +
 
 +
[https://doi.org/10.1038/s41566-021-00831-w Nature Photonics, '''15''', 588–593 (2021)]
 +
 
 +
== [https://doi.org/10.35848/1882-0786/ac1230 Demonstration of high wall-plug efficiency III-nitride micro-light-emitting diodes with MOCVD-grown tunnel junction contacts using chemical treatments] ==
 +
''Matthew S. Wong, Matthew S. Wong ...  James Speck, Shuji Nakamura, Steve DenBaars''
 +
 
 +
[https://doi.org/10.35848/1882-0786/ac1230 Appl. Phys. Express A, '''14''', 086502, 2021]
 +
 
 +
== [https://doi.org/10.1063/5.0054005 Demonstration of high efficiency cascaded blue and green micro-light-emitting diodes with independent junction control] ==
 +
''Panpan Li, Hongjian Li ...  James Speck, Shuji Nakamura, Steve DenBaars''
 +
 
 +
[https://doi.org/10.1063/5.0054005 Appl. Phys. Lett., '''118''', 261104, 2021]
 +
 
 +
== [https://doi.org/10.1021/acsphotonics.0c00766 Room-Temperature Continuous-Wave Electrically Driven Semipolar (202̅1) Blue Laser Diodes Heteroepitaxially Grown on a Sapphire Substrate] ==
 +
''Haojun Zhang, Hongjian Li ...  James Speck, Shuji Nakamura, Steve DenBaars''
 +
 
 +
[https://doi.org/10.1021/acsphotonics.0c00766 ACS Photonics, '''7''' (7), 1662–1666, 2020]
 +
 
 +
== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==
 +
''William J. Mitchell, Brian J. Thibeault, Demis D. John, and Thomas E. Reynolds''
 +
 
 +
[https://doi.org/10.1116/6.0001030 Journal of Vacuum Science and Technology A, '''39''', 043204, May 27th 2021]
 +
 
 +
A similar process flow can be found at the [[ICP_Etching_Recipes#SiO2_Etching_.28Fluorine_ICP_Etcher.29|Fluorine-ICP Recipe Page]].
 +
 
 +
== [https://doi.org/10.1103/PhysRevLett.126.113601 Stimulated Raman Adiabatic Passage in Optomechanics] ==
 +
''Vitaly Fedoseev, Fernando Luna, Ian Hedgepeth, Wolfgang Löffler, and Dirk Bouwmeester''
 +
 
 +
[https://doi.org/10.1103/PhysRevLett.126.113601 Phys. Rev. Lett., '''126''', 113601, March 19th 2021]
 +
 
 +
== [https://doi.org/10.1364/OL.394121 Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides] ==
 +
''Warren Jin, Demis D. John, Jared F. Bauters, Tony Bosch, Brian J. Thibeault, and John E. Bowers''
 +
 
 +
[https://doi.org/10.1364/OL.394121 Optics Letters Vol. 45, Issue 12, pp. 3340-3343 (2020)]
 +
 
 +
== [https://www.nature.com/articles/s41586-019-1666-5 Quantum supremacy using a programmable superconducting processor] ==
 +
''F. Arute, K. Arya, ... Harmut Neven, John M. Martinis''
 +
 
 +
[https://www.nature.com/articles/s41586-019-1666-5 Nature, volume 574, pages 505–510 (2019)]
 +
 
 +
== [https://www.nature.com/articles/s41586-018-0065-7 An optical-frequency synthesizer using integrated photonics] ==
 +
''D. T. Spencer, T. Drake, ... John E. Bowers, Scott A. Diddams, Scott B. Papp''
 +
 
 +
[https://www.nature.com/articles/s41586-018-0065-7 Nature, volume 557, pages 81–85 (2018)]
 +
 
 +
== [https://aip.scitation.org/doi/10.1063/1.5007746 Continuous-wave operation of m-plane GaN-based vertical-cavity surface-emitting lasers with a tunnel junction intracavity contact] ==
 +
''C.A. Forman, S.G. Lee, ... S.P. DenBaars, S. Nakamura''
 +
 
 +
[https://aip.scitation.org/doi/10.1063/1.5007746 Applied Physics Letters, Vol. 112, Issue 11, 2018]
 +
 
 +
== [https://iopscience.iop.org/article/10.1088/1538-3873/aab5e7/meta DARKNESS: A Microwave Kinetic Inductance Detector Integral Field Spectrograph for High-contrast Astronomy] ==
 +
''S.R. Meeker, B.A. Mazin, ... G. Vasisht, E. Serabyn''
 +
 
 +
[https://iopscience.iop.org/article/10.1088/1538-3873/aab5e7/meta Astronomical Society of the Pacific, Volume 130, Issue 988, pp. 065001 (2018)]
 +
 
 +
== [https://doi.org/10.1021/acs.analchem.8b00510 Dielectrophoretic Nanoparticle Aggregation for On-Demand Surface Enhanced Raman Spectroscopy Analysis] ==
 +
''R. Salemmilani, B.D. Piorek, A.W. Fountain, M. Moskovits, C.D. Meinhart''
 +
 
 +
[https://doi.org/10.1021/acs.analchem.8b00510 Analytical Chemistry, 90, 13, 7930-7936 (2018)]
 +
 
 +
== [https://doi.org/10.1109/TED.2017.2770087 Demonstration of Constant 8 W/mm Power Density at 10, 30, and 94 GHz in State-of-the-Art Millimeter-Wave N-Polar GaN MISHEMTs] ==
 +
''B. Romanczyk, S. Wienecke, M. Guidry, H. Li, E. Ahmadi, X. Zheng, S. Keller, U.K. Mishra''
 +
 
 +
[https://doi.org/10.1109/TED.2017.2770087 IEEE Transactions On Electron Devices, Vol. 65, No. 1 (2018)]
  
  
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== NanoFab making LN2 icecream ==
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Tomorrow the NanoFab will be serving liquid nitrogen ice cream.
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== Title of Publication ==
// ~~~~
+
A. List, of, authors ... Use, Ellipses, I.F. Needed
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[http://URL.TO.PUBLIHERS.SITE/or/DOI  scientific citation, vol. 1, page 1-2, (2019)]
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Latest revision as of 08:36, 18 August 2022

Publications using the Nanofab

250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides

Debapam Bose, Jiawei Wang, and Daniel J. Blumenthal

Conference on Lasers and Electro-Optics (CLEO), Technical Digest Series (Optica Publishing Group, 2022), paper SF3O.1

0.5T0.5R—An Ultracompact RRAM Cell Uniquely Enabled by van der Waals Heterostructures

D. Zhang, C. -H. Yeh, W. Cao and K. Banerjee

IEEE Transactions on Electron Devices, 68 (4), 2033-2040 (2021)

Laser soliton microcombs heterogeneously integrated on silicon

Chao Xiang, Junqiu Liu, .... Bowers, J.

Science, 373 (650), 99-103 (2021)

Ultrabright Entangled-Photon-Pair Generation from an AlGaAs-On-Insulator Microring Resonator

Trevor J. Steiner, Joshua E. Castro, Lin Chang ... John E. Bowers, and Galan Moody

PRX Quantum, 2 010337 (2021)

Visible light photonic integrated Brillouin laser

Chauhan, N., Isichenko, A., Liu, K. ... Blumenthal, D.

Nature Communications, 12, p.4685 (2021)

Optically synchronized fibre links using spectrally pure chip-scale lasers

Brodnik, G.M., Harrington, M.W., Dallyn, J.H. .... Blumenthal, D.

Nature Photonics, 15, 588–593 (2021)

Demonstration of high wall-plug efficiency III-nitride micro-light-emitting diodes with MOCVD-grown tunnel junction contacts using chemical treatments

Matthew S. Wong, Matthew S. Wong ... James Speck, Shuji Nakamura, Steve DenBaars

Appl. Phys. Express A, 14, 086502, 2021

Demonstration of high efficiency cascaded blue and green micro-light-emitting diodes with independent junction control

Panpan Li, Hongjian Li ... James Speck, Shuji Nakamura, Steve DenBaars

Appl. Phys. Lett., 118, 261104, 2021

Room-Temperature Continuous-Wave Electrically Driven Semipolar (202̅1) Blue Laser Diodes Heteroepitaxially Grown on a Sapphire Substrate

Haojun Zhang, Hongjian Li ... James Speck, Shuji Nakamura, Steve DenBaars

ACS Photonics, 7 (7), 1662–1666, 2020

Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask

William J. Mitchell, Brian J. Thibeault, Demis D. John, and Thomas E. Reynolds

Journal of Vacuum Science and Technology A, 39, 043204, May 27th 2021

A similar process flow can be found at the Fluorine-ICP Recipe Page.

Stimulated Raman Adiabatic Passage in Optomechanics

Vitaly Fedoseev, Fernando Luna, Ian Hedgepeth, Wolfgang Löffler, and Dirk Bouwmeester

Phys. Rev. Lett., 126, 113601, March 19th 2021

Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides

Warren Jin, Demis D. John, Jared F. Bauters, Tony Bosch, Brian J. Thibeault, and John E. Bowers

Optics Letters Vol. 45, Issue 12, pp. 3340-3343 (2020)

Quantum supremacy using a programmable superconducting processor

F. Arute, K. Arya, ... Harmut Neven, John M. Martinis

Nature, volume 574, pages 505–510 (2019)

An optical-frequency synthesizer using integrated photonics

D. T. Spencer, T. Drake, ... John E. Bowers, Scott A. Diddams, Scott B. Papp

Nature, volume 557, pages 81–85 (2018)

Continuous-wave operation of m-plane GaN-based vertical-cavity surface-emitting lasers with a tunnel junction intracavity contact

C.A. Forman, S.G. Lee, ... S.P. DenBaars, S. Nakamura

Applied Physics Letters, Vol. 112, Issue 11, 2018

DARKNESS: A Microwave Kinetic Inductance Detector Integral Field Spectrograph for High-contrast Astronomy

S.R. Meeker, B.A. Mazin, ... G. Vasisht, E. Serabyn

Astronomical Society of the Pacific, Volume 130, Issue 988, pp. 065001 (2018)

Dielectrophoretic Nanoparticle Aggregation for On-Demand Surface Enhanced Raman Spectroscopy Analysis

R. Salemmilani, B.D. Piorek, A.W. Fountain, M. Moskovits, C.D. Meinhart

Analytical Chemistry, 90, 13, 7930-7936 (2018)

Demonstration of Constant 8 W/mm Power Density at 10, 30, and 94 GHz in State-of-the-Art Millimeter-Wave N-Polar GaN MISHEMTs

B. Romanczyk, S. Wienecke, M. Guidry, H. Li, E. Ahmadi, X. Zheng, S. Keller, U.K. Mishra

IEEE Transactions On Electron Devices, Vol. 65, No. 1 (2018)