News from the U.C. Santa Barbara Nanofabrication Facility.
Metal Processes on the Atomic Layer Deposition
New Deep Silicon Etcher Online
A new Plasma-Therm Versaline DSE III DRIE etcher has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer.
-- 22:16, 27 November 2017 (PST)
2016 Survey Results
See the May 2016 User Survey Results.
-- 12:00, 01 May 2016 (PST)
CAIBE Ion Mill Available
-- 12:00, 01 July 2015 (PST)
NanoFiles SFTP Online
Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check SignupMonkey for details.
-- 12:00, 07 July 2013 (PST)