Difference between revisions of "Template:News"

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=== New Deep Silicon Etcher Online ===
 
=== New Deep Silicon Etcher Online ===
 
A new [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|Plasma-Therm Versaline DSE III DRIE etcher]] has been qualified for bosch etch and single-step etches, and is available for use.  The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer.  
 
A new [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|Plasma-Therm Versaline DSE III DRIE etcher]] has been qualified for bosch etch and single-step etches, and is available for use.  The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer.  
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[[User:Thibeault|-- ]] 12:00, 07 July 2013 (PST)
 
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Revision as of 21:16, 2 December 2017

News from the U.C. Santa Barbara Nanofabrication Facility.

New Deep Silicon Etcher Online

A new Plasma-Therm Versaline DSE III DRIE etcher has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer.

-- 22:16, 27 November 2017 (PST)


2016 Survey Results

See the May 2016 User Survey Results.

-- 12:00, 01 May 2016 (PST)


CAIBE Ion Mill Available

The CAIBE (Oxford Ion Mill) is up and running! Contact Brian Lingg for more information.

-- 12:00, 01 July 2015 (PST)


NanoFiles SFTP Online

Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check SignupMonkey for details.

-- 12:00, 07 July 2013 (PST)