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Revision as of 23:44, 27 November 2017


News from the U.C. Santa Barbara Nanofabrication Facility



New Deep Silicon Etcher Online

The new Plasma-Therm Versaline DSE III DRIE etcher has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer.

-- Demis (talk) 22:16, 27 November 2017 (PST)


2016 Survey Results

See the May 2016 User Survey Results.

-- Brian Thibeault 12:00, 01 May 2016 (PST)


CAIBE Ion Mill Available

The CAIBE (Oxford Ion Mill) is up and running! Contact Brian Lingg for more information.

-- Brian Thibeault 12:00, 01 July 2015 (PST)


NanoFiles SFTP Online

Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check SignupMonkey for details.

-- Brian Thibeault 12:00, 07 July 2013 (PST)