Template:LithRecipe Table

From UCSB Nanofab Wiki
Revision as of 07:57, 21 August 2012 by Zwarburg (talk | contribs)
Jump to navigation Jump to search

| width="65" bgcolor="#DAF1FF" | Suss Aligners | width="65" bgcolor="#DAF1FF" | Contact Aligner | width="65" bgcolor="#DAF1FF" | Stepper 1 (GCA 6300) | width="65" bgcolor="#DAF1FF" | Stepper 2 (AutoStep 200) | width="65" bgcolor="#DAF1FF" | Stepper 3 (ASML DUV) | width="30" bgcolor="#DAF1FF" | DUV Flood | width="65" bgcolor="#DAF1FF" | Field Emission SEM 1 (FEI Sirion) | width="65" bgcolor="#DAF1FF" | E-Beam Lithography System (JEOL JBX-6300FS)