Difference between revisions of "Template:LithRecipe Table"

Latest revision as of 23:25, 13 September 2020

SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)

Used on the Lithography Recipes page to repeat the Table header multiple times.

@@ Line 1: / Line 1: @@
-| width="65" bgcolor="#DAF1FF" | [[Contact_Alignment_Recipes#Suss Aligners (SUSS MJB-3)|Suss Aligners]]
+<includeonly>| width="100" bgcolor="#DAF1FF" | [[Contact_Alignment_Recipes#Suss Aligners (SUSS MJB-3)|SUSS MJB-3]]
-| width="65" bgcolor="#DAF1FF" | [[Contact_Alignment_Recipes#Contact Aligner (SUSS MA-6)|Contact Aligner]]
+| width="100" bgcolor="#DAF1FF" | [[Contact_Alignment_Recipes#Contact Aligner (SUSS MA-6)|SUSS MA-6]]
 | width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 1 (GCA 6300)|Stepper 1<br>(GCA 6300)]]
 | width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 2 (AutoStep 200)|Stepper 2<br>(AutoStep 200)]]
 | width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 3 (ASML DUV)|Stepper 3<br>(ASML DUV)]]
-| width="30" bgcolor="#DAF1FF" | [[Flood_Exposure_Recipes#DUV Flood Expose|DUV Flood]]
+| width="100" bgcolor="#DAF1FF" | [[Maskless Aligner Recipes|MLA150<br>(Heidelberg)]]</includeonly>
+<noinclude>
-| width="175" bgcolor="#DAF1FF" | [[E-Beam_Lithography_Recipes#Field Emission SEM 1 (FEI Sirion)|Field Emission SEM 1<br>(FEI Sirion)]]
-| width="175" bgcolor="#DAF1FF" | [[E-Beam_Lithography_Recipes#E-Beam Lithography System (JEOL JBX-6300FS)|E-Beam Lithography System<br>(JEOL JBX-6300FS)]]
+{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
+|- {{LithRecipe Table}}
+|}
+<hr>
+[[category:Templates]]
+Used on the '''[https://wiki.nanotech.ucsb.edu/wiki/Lithography_Recipes#Photolithography_Recipes Lithography Recipes page]''' to repeat the Table header multiple times.

Difference between revisions of "Template:LithRecipe Table"

Latest revision as of 23:25, 13 September 2020

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