Difference between revisions of "Template:LithRecipe Table"
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(Created page with "| width="65" bgcolor="#DAF1FF" | MLB-3 | width="65" bgcolor="#DAF1FF" | MA-6 | width="65" bgcolor="#DAF1FF" | GCA 6300 | width="65" bgcolor="#DAF1FF" | [[GCA Autos…") |
(correct Maskless aligner link) |
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+ | <includeonly>| width="100" bgcolor="#DAF1FF" | [[Contact_Alignment_Recipes#Suss Aligners (SUSS MJB-3)|SUSS MJB-3]] |
| − | | width=" |
+ | | width="100" bgcolor="#DAF1FF" | [[Contact_Alignment_Recipes#Contact Aligner (SUSS MA-6)|SUSS MA-6]] |
| − | | width=" |
+ | | width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 1 (GCA 6300)|Stepper 1<br>(GCA 6300)]] |
| − | | width=" |
+ | | width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 2 (AutoStep 200)|Stepper 2<br>(AutoStep 200)]] |
| − | | width=" |
+ | | width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 3 (ASML DUV)|Stepper 3<br>(ASML DUV)]] |
| − | | width=" |
+ | | width="100" bgcolor="#DAF1FF" | [[Maskless Aligner Recipes|MLA150<br>(Heidelberg)]]</includeonly> |
| + | <noinclude> |
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| − | | width="65" bgcolor="#DAF1FF" | [[FEI Sirion]] |
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| + | |||
| − | | width="65" bgcolor="#DAF1FF" | [[JEOL 6300]] |
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| + | {| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1" |
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| + | |- {{LithRecipe Table}} |
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| + | |} |
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| + | |||
| + | <hr> |
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| + | [[category:Templates]] |
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| + | Used on the '''[https://wiki.nanotech.ucsb.edu/wiki/Lithography_Recipes#Photolithography_Recipes Lithography Recipes page]''' to repeat the Table header multiple times. |
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Latest revision as of 23:25, 13 September 2020
| SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) |
Used on the Lithography Recipes page to repeat the Table header multiple times.