Template:Announcements

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Revision as of 22:14, 27 September 2020 by John d (talk | contribs) (links to Velion + MLA tool pages)
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Equipment Status


NanoFab COVID Response

Following guidelines provided by our Office of Research, the UCSB Nanofabrication Facility is open only for limited/authorized use for critical activity at this time.

Contact the Lab Director for more information.

The most recent COVID Protocols can be found at COVID-19_User_Policies.

// John d 15:00, 19 July 2020 (PDT)

New Tool Installations

See the News Feed for info on two upcoming tool installations! The Raith Velion FIB is up and running, we are eagerly awaiting Dr. Dan Read's arrival to bring this tool to life. See the Velion's Tool page here.

The Heidelberg MLA150 Maskless Aligner has been installed, and is in the process of being qualified/characterized. See the MLA150's tool page here.

// John d 17:48, 2 June 2020 (PDT)

Unaxis ICP-PECVD

The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.

// Thibeault 14:22, 26 March 2020 (PDT)