Template:Announcements

Equipment Status

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GCA Autosetp Maintenance

The system will be down for service Monday January 20, 2020 until late afternoon Wednesday January 22nd. Silva 08:14, 16 January 2020 (PST)

GCA 6300 Maintenance

The system will be down for service Thursday January 23, 2020 until late afternoon. Silva 08:15, 16 January 2020 (PST)

ASML is UP

Laser Gas Fill enabled. System calibrated, ready for use. // John d 09:27, 13 January 2020 (PST)

ASML Maintenance: Feb 10th - 19th

System will be unavailable from Monday Feb 10th to Wednesday Feb 19th. May be able to open up the system earlier depending on how the work goes. // John d 16:03, 14 January 2020 (PST)

Unaxis ICP-PECVD

The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)

Suss Bonder

Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)