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Revision as of 16:03, 14 January 2020 by John d (talk | contribs) (ASML PM Feb)
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Equipment Status


Laser Gas Fill enabled. System calibrated, ready for use. // John d 09:27, 13 January 2020 (PST)

ASML Maintenance: Feb 10th - 19th

System will be unavailable from Monday Feb 10th to Wednesday Feb 19th. May be able to open up the system earlier depending on how the work goes. // John d 16:03, 14 January 2020 (PST)


The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)

Suss Bonder

Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)