Template:Announcements

From UCSB Nanofab Wiki
Jump to navigation Jump to search

Equipment Status


ASML is UP

System is up, calibrated and ready for use. // John d 10:00, 9 January 2020 (PST)

Unaxis ICP-PECVD

The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)

Suss Bonder

Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)