Template:Announcements
Revision as of 11:01, 30 December 2019 by John d (talk | contribs) (→ASML is DOWN: light bulb update)
Equipment Status
Nanofab is OPEN
The cleanroom is now open. // John d 08:50, 28 December 2019 (PST)
ASML is DOWN
Level sensor failed, suspect it is just a halogen light bulb. ASML support staff is unavailable until Jan 2nd due to vacations. Will work on it as soon as we get the procedure from ASML. // John d 10:01, 30 December 2019 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)
Suss Bonder
Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)